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Robert A. Weaver

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Publication

Featured researches published by Robert A. Weaver.

Archive | 2000

Method for electrochemically depositing metal on a semiconductor workpiece

Linlin Chen; Gregory J. Wilson; Paul R. McHugh; Robert A. Weaver; Thomas L. Ritzdorf

Archive | 2001

Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

Gregory J. Wilson; Paul R. McHugh; Robert A. Weaver; Thomas L. Ritzdorf

Archive | 2001

Methods and apparatus for processing microelectronic workpieces using metrology

Thomas L. Ritzdorf; Steve L. Eudy; Gregory J. Wilson; Paul R. McHugh; Robert A. Weaver; Brian Aegerter; Curt Dundas; Steven L. Peace

Archive | 2005

Apparatus and method for electrochemically depositing metal on a semiconductor workpiece

Linlin Chen; Gregory J. Wilson; Paul R. McHugh; Robert A. Weaver; Thomas L. Ritzdorf

Archive | 2002

Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature

Robert A. Weaver; Paul R. McHugh; Gregory J. Wilson

Archive | 1997

Semiconductor processing furnace outflow cooling system

John Z. Smith; Martin Jones; Paul McHugh; Robert A. Weaver

Archive | 2002

Apparatus and methods for transferring heat during chemical processing of microelectronic workpieces

Lyndon W. Graham; Robert A. Weaver; Gregory J. Wilson; Kyle M. Hanson

Archive | 2001

Procedes et appareil de traitement microelectronique de pieces a usiner au moyen de la metrologie

Thomas L. Ritzdorf; Steve L. Eudy; Gregory J. Wilson; Paul R. McHugh; Robert A. Weaver; Brian Aegerter; Curt Dundas; Steven L. Peace

Archive | 2001

Electrodes de reglage mises en application dans un reacteur servant a effectuer le traitement electrochimique d'une piece microelectronique

Gregory J. Wilson; Paul R. McHugh; Robert A. Weaver; Thomas L. Ritzdorf

Archive | 2001

Einstellung von elektroden verwendet in einem reaktor zur elektro-chemischen behandlung eines mikroelektronischen werkstückes

Gregory J. Wilson; Paul R. McHugh; Robert A. Weaver; Thomas L. Ritzdorf

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Gregory J. Wilson

Applied Materials

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Paul R. McHugh

Applied Materials

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Thomas L. Ritzdorf

Applied Materials

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Curt Dundas

Applied Materials

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Linlin Chen

Applied Materials

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Kyle M. Hanson

Applied Materials

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Lyndon W. Graham

Applied Materials

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