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Thomas L. Ritzdorf

Applied Materials

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Publication

Featured researches published by Thomas L. Ritzdorf.

Archive | 2000

Method for electrochemically depositing metal on a semiconductor workpiece

Linlin Chen; Gregory J. Wilson; Paul R. McHugh; Robert A. Weaver; Thomas L. Ritzdorf

Archive | 2001

Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

Gregory J. Wilson; Paul R. McHugh; Robert A. Weaver; Thomas L. Ritzdorf

Archive | 1999

Electroplating system having auxiliary electrode exterior to main reactor chamber for contact cleaning operations

Lyndon W. Graham; Kyle M. Hanson; Thomas L. Ritzdorf; Jeffrey I. Turner

Archive | 2001

Methods and apparatus for processing microelectronic workpieces using metrology

Thomas L. Ritzdorf; Steve L. Eudy; Gregory J. Wilson; Paul R. McHugh; Robert A. Weaver; Brian Aegerter; Curt Dundas; Steven L. Peace

Archive | 2002

Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processes based on metrology

Thomas L. Ritzdorf; Steve L. Eudy; Gregory J. Wilson; Paul R. McHugh

Archive | 1999

Apparatus for high deposition rate solder electroplating on a microelectronic workpiece

Robert W. Batz; Scot Conrady; Thomas L. Ritzdorf

Archive | 2005

Apparatus and method for electrochemically depositing metal on a semiconductor workpiece

Linlin Chen; Gregory J. Wilson; Paul R. McHugh; Robert A. Weaver; Thomas L. Ritzdorf

Archive | 2003

Methods for controlling and/or measuring additive concentration in an electroplating bath

Lyndon W. Graham; Thomas C. Taylor; Thomas L. Ritzdorf; Fredrick A. Lindberg; Bradley C. Carpenter

Archive | 2005

Apparatus and methods for electrochemical processing of microelectronic workpieces

Kayle M. Hanson; Thomas L. Ritzdorf; Gregory J. Wilson; Paul R. McHugh

Archive | 1999

Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device

Thomas L. Ritzdorf; E. Henry Stevens; Linlin Chen; Lyndon W. Graham; Curt Dundas

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Collaboration

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Lyndon W. Graham

Applied Materials

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Gregory J. Wilson

Applied Materials

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Linlin Chen

Applied Materials

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Paul R. McHugh

Applied Materials

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Curt Dundas

Applied Materials

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Kyle M. Hanson

Applied Materials

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Robert W. Batz

Applied Materials

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E. Henry Stevens

Applied Materials

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Daniel J. Woodruff

Applied Materials

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John L. Klocke

Applied Materials

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