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Robert Brent Vopat

Varian Semiconductor

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Publication

Featured researches published by Robert Brent Vopat.

Archive | 2010

Implant mask with moveable mask segments

Robert Brent Vopat; William T. Weaver; Charles T. Carlson

Archive | 2015

ELECTROSTATIC CHARGE REMOVAL FOR SOLAR CELL GRIPPERS

Jason M. Schaller; Robert Brent Vopat

Archive | 2010

System and method for handling multiple workpieces for matrix configuration processing

William T. Weaver; Jaime A. Carrera; Robert Brent Vopat; Aaron P. Webb; Charles T. Carlson

Archive | 2012

HIGH-THROUGHPUT WORKPIECE HANDLING

Jason M. Schaller; Robert Brent Vopat; Charles T. Carlson; Malcolm N. Daniel; Aaron P. Webb; William T. Weaver

Archive | 2013

Dynamic pitch substrate lift

Robert Brent Vopat; Jason M. Schaller; Jeffrey Charles Blahnik; Malcolm N. Daniel

Archive | 2013

System and method for quick-swap of multiple substrates

Robert Brent Vopat; Jason M. Schaller; William T. Weaver

Archive | 2010

Implant mask with moveable hinged mask segments

Robert Brent Vopat; William T. Weaver; Charles T. Carlson

Archive | 2014

VENTURI ASSISTED GRIPPER

Jason M. Schaller; Robert Brent Vopat

Archive | 2014

Dynamic heating method and system for wafer processing

Morgan D. Evans; Kevin Anglin; D. Jeffrey Lischer; William T. Weaver; Jason M. Schaller; Robert Brent Vopat

Archive | 2014

TWO-DIMENSIONAL MASS RESOLVING SLIT MECHANISM FOR SEMICONDUCTOR PROCESSING SYSTEMS

Jason M. Schaller; Robert Brent Vopat

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Collaboration

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Jason M. Schaller

Varian Semiconductor

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William T. Weaver

Applied Materials

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Charles T. Carlson

Varian Semiconductor

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David Blahnik

Varian Semiconductor

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Aaron P. Webb

Varian Semiconductor

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Jeffrey Charles Blahnik

Varian Semiconductor

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Malcolm N. Daniel

Varian Semiconductor

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Morgan D. Evans

Varian Semiconductor

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Ala Moradian

Varian Semiconductor

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Paul E. Pergande

Varian Semiconductor

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