Roland Scheuerer

Micromechanical Capacitive Sensor Element

Micromechanical Component Having Multiple Caverns, and Manufacturing Method

Micromechanical component with a number of chambers and production method

Mikromechanisches Bauelement mit mehreren Kavernen und Herstellungsverfahren

Method for producing a micromechanical component having a trench structure for backside contact

Verfahren zur Herstellung eines mikromechanischen Bauelements mit Trenchstruktur zur Rückseitenkontaktierung

Mikromechanisches kapazitives Sensorelement

Manufacturing method of microstructured component, e.g. pressure sensor, rotary plate sensor, or mass flow sensor with underetched structure etc., with at least following process steps

Thermoelectric sensor and production process has two substrates with a hollow space between them having an opening and containing conductive structures for each substrate

Input detector i.e. speech recognition device, for e.g. steering wheel for detecting requirement of driver of vehicle, has evaluation unit evaluating signal generated by acceleration or vibration sensor for determining requirement