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Helmut Baumann

Bosch

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Publication

Featured researches published by Helmut Baumann.

Archive | 2000

Sensor with at least one micromechanical structure and method for production thereof

Frank Reichenbach; Stefan Pinter; Frank Henning; Hans Artmann; Helmut Baumann; Franz Laemer; Michael Offenberg; Georg Bischopink

Archive | 1998

Wafer stack and method of producing sensors

Jürgen Kurle; Kurt Weiblen; Stefan Pinter; Horst Muenzel; Helmut Baumann; Dietrich Schubert; Karl Bender; Markus Lutz

Archive | 1992

Method of assembling micromechanical sensors

Rolf Becker; Klaus Jaeckel; Jiri Marek; Frank Bantien; Helmut Baumann; Kurt Weiblen; Martin Willmann

Archive | 1996

Angular velocity sensor with built-in limit stops

Juergen Kurle; Kurt Weiblen; Horst Muenzel; Helmut Baumann; Klaus Heyers; Markus Lutz

Archive | 1995

Semiconductor sensor having a protective layer

Uwe Lipphardt; Guenther Dipl Ing Findler; Horst Muenzel; Helmut Baumann

Archive | 1993

Method for dicing composite wafers

Helmut Baumann; Juergen Kurle; Peter Dipl Ing Eiberger

Archive | 1994

Halbleitersensor mit Schutzschicht

Uwe Lipphardt; Guenther Dipl Ing Findler; Horst Muenzel; Helmut Baumann

Archive | 2005

Micromechanical Capacitive Sensor Element

Hubert Benzel; Stefan Finkbeiner; Frank Fischer; Helmut Baumann; Lars Metzger; Roland Scheuerer; Peter Brauchle; Andreas Feustel; Matthias Neubauer

Archive | 1999

Sensor comprises a micromechanical structure based on silicon integrated in the sensor chamber of a base wafer and a cover made of a transparent deposition layer and a sealing layer

Frank Reichenbach; Stefan Pinter; Frank Henning; Hans Artmann; Helmut Baumann; Franz Laermer; Michael Offenberg; Georg Bischopink

Archive | 2001

Micromechanical cap structure and the respective manufacturing method

Stefan Pinter; Harald Emmerich; Hans-Peter Trah; Helmut Baumann

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Collaboration

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Kurt Weiblen

Bosch

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Stefan Pinter

Bosch

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Horst Muenzel

Bosch

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Juergen Kurle

Bosch

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Roland Scheuerer

Bosch

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Dietrich Schubert

Bosch

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Guenther Dipl Ing Findler

Bosch

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Markus Lutz

Bosch

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Michael Offenberg

Bosch

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Georg Bischopink

Bosch

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