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Latest external collaboration on country level. Dive into details by clicking on the dots.

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Dive into the research topics where Helmut Baumann is active.

Publication


Featured researches published by Helmut Baumann.


Archive | 2000

Sensor with at least one micromechanical structure and method for production thereof

Frank Reichenbach; Stefan Pinter; Frank Henning; Hans Artmann; Helmut Baumann; Franz Laemer; Michael Offenberg; Georg Bischopink


Archive | 1998

Wafer stack and method of producing sensors

Jürgen Kurle; Kurt Weiblen; Stefan Pinter; Horst Muenzel; Helmut Baumann; Dietrich Schubert; Karl Bender; Markus Lutz


Archive | 1992

Method of assembling micromechanical sensors

Rolf Becker; Klaus Jaeckel; Jiri Marek; Frank Bantien; Helmut Baumann; Kurt Weiblen; Martin Willmann


Archive | 1996

Angular velocity sensor with built-in limit stops

Juergen Kurle; Kurt Weiblen; Horst Muenzel; Helmut Baumann; Klaus Heyers; Markus Lutz


Archive | 1995

Semiconductor sensor having a protective layer

Uwe Lipphardt; Guenther Dipl Ing Findler; Horst Muenzel; Helmut Baumann


Archive | 1993

Method for dicing composite wafers

Helmut Baumann; Juergen Kurle; Peter Dipl Ing Eiberger


Archive | 1994

Halbleitersensor mit Schutzschicht

Uwe Lipphardt; Guenther Dipl Ing Findler; Horst Muenzel; Helmut Baumann


Archive | 2005

Micromechanical Capacitive Sensor Element

Hubert Benzel; Stefan Finkbeiner; Frank Fischer; Helmut Baumann; Lars Metzger; Roland Scheuerer; Peter Brauchle; Andreas Feustel; Matthias Neubauer


Archive | 1999

Sensor comprises a micromechanical structure based on silicon integrated in the sensor chamber of a base wafer and a cover made of a transparent deposition layer and a sealing layer

Frank Reichenbach; Stefan Pinter; Frank Henning; Hans Artmann; Helmut Baumann; Franz Laermer; Michael Offenberg; Georg Bischopink


Archive | 2001

Micromechanical cap structure and the respective manufacturing method

Stefan Pinter; Harald Emmerich; Hans-Peter Trah; Helmut Baumann

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