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Dive into the research topics where Rolf Freimann is active.

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Featured researches published by Rolf Freimann.


Optics Communications | 1999

Absolute measurement of non-comatic aspheric surface errors

Rolf Freimann; Bernd Dörband; Frank Höller

An absolute test for rotationally symmetric aspheric surfaces was developed. All non-rotationally symmetric surface errors apart from those of comatic nature were determined interferometrically. For this purpose, the asphere was measured 12 times under different angles of rotation. The difference of a single interferogram and the average of all 12 interferograms gave the non-rotationally symmetric errors in an absolute manner apart from the comatic errors. With the purpose of noise reduction, the so-determined 12 interferograms of the non-rotationally symmetric errors were appropriately rotated and subsequently averaged. The rotationally symmetric errors were detected via stylus profilometry. Repeatabilities of the so-obtained aspheric surface errors are presented.


Journal of Modern Optics | 2002

Wavefront aberrations of rotationally symmetric CGHs fabricated by a polar coordinate laser plotter

Stephan Reichelt; M. Daffner; Hans J. Tiziani; Rolf Freimann

Computer-generated holograms (CGHs) were fabricated by a polar coordinate laser plotter. The wavefront aberrations of these CGHs caused by fabrication inaccuracies were measured interferometrically. We tested Fresnel zone plates as typical examples of CGHs with focal ratios of ƒ/10 and ƒ/5 with a Fizeau interferometer. The tests comprised both binary phase holograms and binary amplitude holograms. The wavefront aberrations of the CGHs had an rms variation of about λ /50. Two types of aberrations were identified and could be referred to certain writing errors. Their size was deduced from the interferograms.


Optics Communications | 2001

Absolute interferometric test of Fresnel zone plates

Stephan Reichelt; Rolf Freimann; Hans J. Tiziani

An absolute interferometric test of two-level binary Fresnel zone plates (FZPs) is presented. Five measurements with a wavefront testing interferometer are required to fully separate interferometer errors from those of the FZP. The method provides both errors, pattern errors and surface figure errors of the zone plate absolutely. The test method is suitable for zone mirrors and zone lenses. Test setups are explained, equations are derived and experimental results are presented. Further, applications of the absolute diffractive test method are described. For the estimation of the accuracy of the diffractive calibration method a comparison with the classical three-position test was carried out.


Archive | 2004

Refractive projection objective

Hans-Juergen Rostalski; Karl-Heinz Schuster; Russell Hudyma; Wilhelm Ulrich; Rolf Freimann


Archive | 2008

Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface

Frank Schillke; Rolf Freimann; Matthias Dreher


Archive | 2012

METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETRIC MEASURING DEVICE

Rolf Freimann; Bernd Boerband; Stefan Schulte; Albrecht Hof; Frank Riepenhausen; Matthias Manger; Dietmar Neugebauer; Helmut Ißler; Armin Bich


Archive | 2010

Projection exposure system for microlithography with a measurement device

Ulrich Mueller; Joachim Stuehler; Oswald Gromer; Rolf Freimann; Paul Kaufmann; Bernhard Geuppert


Archive | 2010

Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure

Jochen Hetzler; Frank Schillke; Stefan Schulte; Rolf Freimann; Bernd Doerband


Archive | 2008

PROJECTION ILLUMINATION SYSTEM

Rolf Freimann; Jens Philipps


Archive | 2005

Method of calibrating an interferometer and method of manufacturing an optical element

Rolf Freimann; Bernd Doerband; Frank Schillke; Susanne Beder; Stefan Schulte

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