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Matthias Manger

Carl Zeiss AG

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Publication

Featured researches published by Matthias Manger.

Archive | 2012

METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETRIC MEASURING DEVICE

Rolf Freimann; Bernd Boerband; Stefan Schulte; Albrecht Hof; Frank Riepenhausen; Matthias Manger; Dietmar Neugebauer; Helmut Ißler; Armin Bich

Archive | 2008

Vorrichtung und Verfahren zum Messen der Position von Marken auf einer Maske

Gerd Klose; Michael Arnz; Albecht Hof; Helmut Krause; Ulrich Dr. Strößner; Matthias Manger; Uwe Schellhorn; Karl-Heinz Bechstein

Archive | 2007

Method for determination of residual errors

Uwe Schellhorn; Matthias Manger

Archive | 2005

Calibrating method, measuring method, optical measuring device and operating method for a transmitter arrangement

Uwe Schellhorn; Matthias Manger; Michael Keil; Wolfgang Emer

Archive | 2013

Optical method for measuring angular position of facet of facet mirror for extreme UV (EUV) lithography, involves detecting actual angular positions of facets in preset spectrum of angular positions with respect to reference axis

Matthias Manger; Daniel Runde; Rolf Freimann

Archive | 2004

Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask

Michael Arnz; Oswald Gromer; Gerd Klose; Joachim Stuehler; Matthias Manger

Archive | 2013

Method for measuring an optical system

Thomas Korb; Christian Hettich; Michael Layh; Ulrich Wegmann; Karl-Heinz Schuster; Matthias Manger

Archive | 2009

Optical system for microlithography

Daniel Kraehmer; Wilhelm Ulrich; Matthias Manger; Bernhard Gellrich

Archive | 2008

APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK

Gerd Klose; Michael Arnz; Albrecht Hof; Helmut Krause; Ulrich Stroessner; Matthias Manger; Uwe Schellhorn; Karl-Heinz Bechstein

Archive | 2008

Optical characteristic determining method for illustrating optical system, involves determining image produced on image recording device in each relative position by device, where device is provided opposite to image plane

Gordon Döring; Alfred Gatzweiler; Markus Göppert; Matthias Manger

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Uwe Schellhorn

Carl Zeiss AG

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Gerd Klose

Carl Zeiss AG

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Michael Arnz

Carl Zeiss AG

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Rolf Freimann

Carl Zeiss AG

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Florian Baumer

Carl Zeiss AG

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Albrecht Hof

Carl Zeiss AG

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Armin Bich

Carl Zeiss AG

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Dietmar Neugebauer

Carl Zeiss AG

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Frank Riepenhausen

Carl Zeiss AG

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Helmut Krause

Carl Zeiss AG

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