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Dive into the research topics where Ryo Nawata is active.

Publication


Featured researches published by Ryo Nawata.


Archive | 2004

Positioning apparatus, exposure apparatus and method for producing device

Makoto Mizuno; Ryo Nawata; Mitsuru Inoue


Archive | 2004

Positioning device, exposure apparatus using the positioning device, and device production method

Ryo Nawata; Hiroshi Ito


Archive | 2011

Image acquisition device and adjustment method therefor

Ryo Nawata; 縄田 亮; Yuji Sudoh; 須藤 裕次


Archive | 2004

Technique for positioning optical system element

Ryo Nawata; Hiroshi Ito


Archive | 2011

VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

Ryo Nawata; Katsumi Asada


Archive | 2010

Optical element positioning apparatus, projection optical system and exposure apparatus

Ryo Nawata; Makoto Mizuno; Shigeyuki Uzawa


Archive | 2008

OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Ryo Nawata


Archive | 2011

VIBRATION ISOLATION DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD USING SAME

Ryo Nawata; Katsumi Asada


Archive | 2007

ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Ryo Nawata; Mitsuru Inoue; Hiroshi Ito; Makoto Mizuno


Archive | 2012

IMAGE ACQUISITION APPARATUS AND METHOD FOR ADJUSTING IMAGE ACQUISITION APPARATUS

Ryo Nawata; Yuji Sudoh

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