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Dive into the research topics where Saburou Kanai is active.

Publication


Featured researches published by Saburou Kanai.


Archive | 2005

Plasma processing apparatus and method

Ryoji Nishio; Ken Yoshioka; Saburou Kanai; Tadamitsu Kanekiyo; Hideki Kihara; Koji Okuda


Archive | 2002

Wafer stage for wafer processing apparatus and wafer processing method

Seiichiro Kanno; Ken Yoshioka; Ryoji Nishio; Saburou Kanai; Hideki Kihara; Koji Okuda


Archive | 2002

Wafer processing apparatus and a wafer stage and a wafer processing method

Seiichiro Kanno; Hironobu Kawahara; Mitsuru Suehiro; Saburou Kanai; Toshio Masuda


Archive | 2001

Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe

Seiichiro Kanno; Ryoji Nishio; T. Tetsuka; Junichi Tanaka; Hideyuki Yamamoto; Kazuyuki Ikenaga; Saburou Kanai


Archive | 2003

Wafer stage for wafer processing apparatus

Seiichiro Kanno; Ken Yoshioka; Ryoji Nishio; Saburou Kanai; Hideki Kihara; Koji Okuda


Archive | 1996

Method and apparatus for plasma processing apparatus

Ken Yoshioka; Saburou Kanai; Tetsunori Kaji; Ryoji Nishio; Manabu Edamura


Archive | 2002

Apparatus for processing specimens

Ken Yoshioka; Yoshimi Torii; Moriaki Fuyama; Tomohiro Okada; Saburou Kanai; Takehito Usui; Hitoshi Harata


Archive | 2002

Wafer processing apparatus, wafer stage, and wafer processing method

Seiichiro Kanno; Ken Yoshioka; Ryoji Nishio; Saburou Kanai; Hideki Kihara; Koji Okuda; Manabu Edamura


Archive | 2002

Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield

Yutaka Ohmoto; Hironobu Kawahara; Ken Yoshioka; Kazue Takahashi; Saburou Kanai


Archive | 2002

Method for processing specimens, an apparatus therefor and a method of manufacture of a magnetic head

Ken Yoshioka; Yoshimi Torii; Moriaki Fuyama; Tomohiro Okada; Saburou Kanai; Takehito Usui; Hitoshi Harata

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