Is this you? Create Your Porfile
Avatar

Saburou Kanai

Hitachi

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Saburou Kanai is active.

Explore More

Publication

Featured researches published by Saburou Kanai.

Archive | 2005

Plasma processing apparatus and method

Ryoji Nishio; Ken Yoshioka; Saburou Kanai; Tadamitsu Kanekiyo; Hideki Kihara; Koji Okuda

Archive | 2002

Wafer stage for wafer processing apparatus and wafer processing method

Seiichiro Kanno; Ken Yoshioka; Ryoji Nishio; Saburou Kanai; Hideki Kihara; Koji Okuda

Archive | 2002

Wafer processing apparatus and a wafer stage and a wafer processing method

Seiichiro Kanno; Hironobu Kawahara; Mitsuru Suehiro; Saburou Kanai; Toshio Masuda

Archive | 2001

Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe

Seiichiro Kanno; Ryoji Nishio; T. Tetsuka; Junichi Tanaka; Hideyuki Yamamoto; Kazuyuki Ikenaga; Saburou Kanai

Archive | 2003

Wafer stage for wafer processing apparatus

Seiichiro Kanno; Ken Yoshioka; Ryoji Nishio; Saburou Kanai; Hideki Kihara; Koji Okuda

Archive | 1996

Method and apparatus for plasma processing apparatus

Ken Yoshioka; Saburou Kanai; Tetsunori Kaji; Ryoji Nishio; Manabu Edamura

Archive | 2002

Apparatus for processing specimens

Ken Yoshioka; Yoshimi Torii; Moriaki Fuyama; Tomohiro Okada; Saburou Kanai; Takehito Usui; Hitoshi Harata

Archive | 2002

Wafer processing apparatus, wafer stage, and wafer processing method

Seiichiro Kanno; Ken Yoshioka; Ryoji Nishio; Saburou Kanai; Hideki Kihara; Koji Okuda; Manabu Edamura

Archive | 2002

Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield

Yutaka Ohmoto; Hironobu Kawahara; Ken Yoshioka; Kazue Takahashi; Saburou Kanai

Archive | 2002

Method for processing specimens, an apparatus therefor and a method of manufacture of a magnetic head

Ken Yoshioka; Yoshimi Torii; Moriaki Fuyama; Tomohiro Okada; Saburou Kanai; Takehito Usui; Hitoshi Harata

Explore More

Collaboration

Dive into the Saburou Kanai's collaboration.

Top Co-Authors
Avatar

Ken Yoshioka

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Ryoji Nishio

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Seiichiro Kanno

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Hironobu Kawahara

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Hitoshi Harata

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Manabu Edamura

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Moriaki Fuyama

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Takehito Usui

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Tomohiro Okada

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Yoshimi Torii

Hitachi

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge