Hironobu Kawahara | Researchain

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Featured researches published by Hironobu Kawahara.

Archive | 1988

Plasma treating method and apparatus therefor

Yoshinao Kawasaki; Hironobu Kawahara; Yutaka Kakehi; Kado Hirobe; Katsuyoshi Kudo

Archive | 1992

Method and apparatus for processing samples

Masayuki Kojima; Yoshimi Torii; Michimasa Hunabashi; Kazuyuki Suko; Takashi Yamada; Keizo Kuroiwa; Kazuo Nojiri; Yoshinao Kawasaki; Yoshiaki Sato; Ryooji Fukuyama; Hironobu Kawahara

Archive | 2002

Wafer processing apparatus and a wafer stage and a wafer processing method

Seiichiro Kanno; Hironobu Kawahara; Mitsuru Suehiro; Saburou Kanai; Toshio Masuda

Archive | 1991

Process for etching

Takashi Fujii; Hironobu Kawahara; Kazuo Takata; Masaharu Nishiumi; Noriaki Yamamoto

Archive | 1996

Method of treating samples

Ryooji Fukuyama; Makoto Nawata; Yutaka Kakehi; Hironobu Kawahara; Yoshiaki Sato; Yoshimi Torii; Akira Kawaraya; Yoshie Sato

Archive | 1990

Sample treating method and apparatus

Kotaro Fujimoto; Yoshie Tanaka; Hironobu Kawahara; Yoshiaki Sato

Archive | 1990

Method of removing residual corrosive compounds by plasma etching followed by washing

Yoshinao Kawasaki; Hironobu Kawahara; Yoshiaki Sato; Ryooji Fukuyama; Kazuo Nojiri; Yoshimi Torii

Archive | 1990

Plasma etching method and apparatus

Hironobu Kawahara; Yoshinao Kawasaki; Yoshiaki Sato; Ryooji Fukuyama

Archive | 1991

Sample processing method and apparatus

Yoshinao Kawasaki; Hironobu Kawahara; Yoshiaki Sato; Ryooji Fukuyama; Kazuo Nojiri; Yoshimi Torii

Archive | 1994

Microwave plasma processing apparatus and method

Yoshiaki Sato; Mitsuru Katamoto; Hironobu Kawahara; Minoru Soraoka; Tsuyoshi Umemoto; Hideki Kihara; Katsuyoshi Kudo; Tooru Yukimasa; Hirofumi Kakutani

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