Anastasia Oshelski Peterson

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Featured researches published by Anastasia Oshelski Peterson.

Archive | 2001

Method and apparatus for incorporating control simulation environment

Thomas J. Sonderman; Anthony J. Toprac; Anastasia Oshelski Peterson

Archive | 2000

Method and apparatus for parsing event logs to determine tool operability

Anastasia Oshelski Peterson; Richard D. Edwards

Archive | 2001

METHOD AND APPARATUS FOR CONTROLLING A TOOL USING A BASELINE CONTROL SCRIPT

Christopher A. Bode; Alexander J. Pasadyn; Anthony J. Toprac; Joyce S. Oey Hewett; Anastasia Oshelski Peterson; Thomas J. Sonderman; Michael L. Miller

Archive | 2001

Method and apparatus for adaptively scheduling tool maintenance

Anthony J. Toprac; Thomas J. Sonderman; Christopher A. Bode; Alexander J. Pasadyn; Joyce S. Oey Hewett; Anastasia Oshelski Peterson; Michael L. Miller

Archive | 2001

Method and apparatus for controlling feature critical dimensions based on scatterometry derived profile

Thomas J. Sonderman; Christopher A. Bode; Alexander J. Pasadyn; Anthony J. Toprac; Joyce Oey S. Hewett; Anastasia Oshelski Peterson; Michael L. Miller

Archive | 2002

Method for determining, tracking and/or controlling processing based upon silicon characteristics

Anastasia Oshelski Peterson; Sam H. Allen; Jason A. Grover; Michael R. Conboy

Archive | 2001

METHOD AND APPARATUS FOR INTEGRATING MULTIPLE PROCESS CONTROLLERS

Christopher A. Bode; Alexander J. Pasadyn; Anthony J. Toprac; Joyce S. Oey Hewett; Anastasia Oshelski Peterson; Thomas J. Sonderman; Michael L. Miller

Archive | 2001

Method for prioritizing production lots based on grade estimates and output requirements

Anthony J. Toprac; Joyce S. Oey Hewett; Christopher A. Bode; Alexander J. Pasadyn; Anastasia Oshelski Peterson; Thomas J. Sonderman; Michael L. Miller

Archive | 2001

Method and apparatus for controlling the flow of wafers through a process flow

Alexander J. Pasadyn; Anthony J. Toprac; Christopher A. Bode; Joyce S. Oey Hewett; Anastasia Oshelski Peterson; Thomas J. Sonderman; Michael L. Miller

Archive | 2001

Method and apparatus for controlling process target values based on manufacturing metrics

Christopher A. Bode; Thomas J. Sonderman; Alexander J. Pasadyn; Anthony J. Toprac; Joyce S. Oey Hewett; Anastasia Oshelski Peterson; Michael L. Miller

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