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William N. Sterling

Applied Materials

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Publication

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Archive | 2005

Showerhead mounting to accommodate thermal expansion

John M. White; William N. Sterling

Archive | 2002

End effector assembly

Wendell T. Blonigan; Takayuki Matsumoto; William N. Sterling; Billy C. Leung

Archive | 2005

Heated substrate support for chemical vapor deposition

William N. Sterling; John M. White

Archive | 2004

Slit valve door seal

Yoshiaki Tanase; William N. Sterling; Paul Andrew Haworth

Archive | 2003

End effector assembly for supporting a substrate

Wendell T. Blonigan; Takayuki Matsumoto; William N. Sterling; Billy C. Leung

Archive | 2005

Methods and apparatus for sealing a chamber

John M. White; Shinichi Kurita; William N. Sterling; Yoshiaki Tanase

Archive | 2012

IN-SITU MASK ALIGNMENT FOR DEPOSITION TOOLS

Ilyoung Richard Hong; William N. Sterling; Dongsuh Lee

Archive | 2007

Valve door with ball coupling

Sam H. Kim; Jae-Chull Lee; William N. Sterling; Paul Brown

Archive | 2007

Susceptor with insulative inserts

William N. Sterling; Lan Duong; Gaku Furuta

Archive | 2014

PROCESS GAS FLOW GUIDES FOR LARGE AREA PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEMS AND METHODS

Dongsuh Lee; Beom Soo Park; Yi Cui; William N. Sterling

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Dongsuh Lee

Applied Materials

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John M. White

Applied Materials

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Beom Soo Park

Applied Materials

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Sam H. Kim

Applied Materials

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Billy C. Leung

Applied Materials

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Shinichi Kurita

Applied Materials

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Takayuki Matsumoto

Applied Materials

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Wendell T. Blonigan

Applied Materials

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Yoshiaki Tanase

Applied Materials

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Gaku Furuta

Applied Materials

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