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Satish Sundar

Applied Materials

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Publication

Featured researches published by Satish Sundar.

Archive | 2003

Process and an integrated tool for low k dielectric deposition including a pecvd capping module

Jun Zhao; Farhad Moghadam; Tim Weidman; Rick J. Roberts; Hari Ponnekanti; Chau T. Nguyen; Satish Sundar; David H. Quach; Sasson Somekh

Archive | 1996

Dual blade robot

Kevin Fairbairn; Christopher Lane; Kelly Colborne; Satish Sundar

Archive | 2001

Pneumatically actuated flexure gripper for wafer handling robots

Satish Sundar; Ned G. Matthews

Archive | 1996

Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding

Allen Altwood; Kelly Colborne; Kevin Fairbairn; Christopher Lane; Hari Ponnekanti; Satish Sundar

Archive | 2001

Mechanical gripper for wafer handling robots

Satish Sundar

Archive | 1999

On the fly center-finding during substrate handling in a processing system

Satish Sundar; Peter Ebbing

Archive | 1996

Optimal trajectory robot motion

Satish Sundar

Archive | 1997

Substrate clamping apparatus

Peter Ebbing; Satish Sundar

Archive | 2010

Systems, apparatus and methods for moving substrates

Prudhvi R. Chintalapati; Satish Sundar; Boris Axelrod; Mario Dave Silvetti; Tom K. Cho; Jeffrey A. Brodine; Jason K. Foster; Edward Ng

Archive | 2000

Apparatus for on-the-fly center finding and notch aligning for wafer handling robots

Satish Sundar

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Mario David Silvetti

Applied Materials

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Mario Dave Silvetti

Applied Materials

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Peter Ebbing

Applied Materials

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Vinay Shah

Applied Materials

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Christopher Lane

Applied Materials

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Eric Ruhland

Applied Materials

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Hari Ponnekanti

Applied Materials

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Jeffrey A. Brodine

Applied Materials

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Prudhvi R. Chintalapati

Applied Materials

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Robert B. Moore

Applied Materials

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