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Dive into the research topics where Mario David Silvetti is active.

Publication


Featured researches published by Mario David Silvetti.


Archive | 2003

Substrate heater assembly

Mark Fodor; Sophia M. Velastegui; Soovo Sen; Visweswaren Sivaramakrishnan; Peter Wai-Man Lee; Mario David Silvetti


Archive | 2005

High productivity plasma processing chamber

Mario David Silvetti; David H. Quach; Bok Hoen Kim; Thomas Nowak; Thomas K. Cho; Fred H. Hariz; Robert B. Moore


Archive | 2007

Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support

Andrzej Kaszuba; Sophia M. Velastegui; Visweswaren Sivaramakrishnan; Pyongwon Yim; Mario David Silvetti; Tom K. Cho; Indrajit Lahiri; Surinder S. Bedi


Archive | 2003

Method and apparatus for monitoring the position of a semiconductor processing robot

Pyongwon Yim; Satish Sundar; Vinay Shah; Mario David Silvetti; Douglas Kitajima; Venkatesh Babu; Visweswaren Sivaramakrishnan; Indrajit Lahiri; Surinder S. Bedi


Archive | 2005

Substrate gripper for a substrate handling robot

Michael R. Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Mario David Silvetti; Michael Kuchar; Kirk Van Katwyk; Van Hoskins; Vinay Shah


Archive | 2006

Method of retaining a substrate during a substrate transferring process

Mike Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Mario David Silvetti; Michael Kuchar; Kirk Van Katwyk; Van Hoskins; Vinay Shah


Archive | 2005

Cartesian robot design

Mike Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Mario David Silvetti; Michael Kuchar; Vinay Shah


Archive | 2007

MULTI-LEVEL LOAD LOCK CHAMBER, TRANSFER CHAMBER, AND ROBOT SUITABLE FOR INTERFACING WITH SAME

Robert B. Moore; Eric Ruhland; Satish Sundar; Mario David Silvetti


Archive | 2003

Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics

Lihua Li; Tsutomu Tanaka; Tzu-Fang Huang; Li-Qun Xia; Dian Sugiarto; Visweswaren Sivaramakrishnan; Peter Wai-Man Lee; Mario David Silvetti


Archive | 2004

Universal mid-frequency matching network

Eller Y. Juco; Visweswaren Sivaramakrishnan; Mario David Silvetti; Talex Sajoto

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