Peter Ebbing

Method and apparatus for endpoint detection in a semiconductor wafer etching system

On the fly center-finding during substrate handling in a processing system

Substrate clamping apparatus

Etch rate monitor using collimated light and method of using same

Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport

Method and dry vapor generator channel assembly for conveying a liquid from a liquid source to a liquid vaporizer with minimal liquid stagnation

Method of aligning wafers and device therefor

Electrically heated fluid carrying conduit having integrated heating elements and electrical conductors

Method and apparatus for normalizing a laser beam to a reflective surface

Pneumatic circuit to provide different opening and closing speeds for a pneumatic operator