Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Sato Takashi is active.

Publication


Featured researches published by Sato Takashi.


Archive | 1999

Pattern-measuring method

Nomura Hiroshi; Sato Takashi; Kono Takuya; Iba Junichiro


Archive | 2009

SIMULATION METHOD AND PROGRAM FOR SIMULATION

Sanhongi Akiko; Sato Takashi


Archive | 2006

EXPOSURE SYSTEM, AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE

Kono Takuya; Sato Takashi; Touki Tatsuhiko; Inoue Soichi; Sanhongi Shoji


Archive | 2010

INSPECTION METHOD OF EXPOSURE DEVICE

Kasa Kentaro; Fukuhara Kazuya; Sato Takashi


Archive | 2008

CORRECTION METHOD FOR OPTICAL PROXIMITY EFFECT

Fukuhara Kazuya; Touki Tatsuhiko; Kotani Toshiya; Tanaka Satoshi; Sato Takashi; Sanhongi Akiko; Satake Masaki


Archive | 2008

METHOD FOR INSPECTING LOCAL VARIANCE IN MASK PATTERN, METHOD FOR ASSURING LOCAL VARIANCE, AND INSPECTION PROGRAM FOR LOCAL VARIANCE

Sanhongi Akiko; Sanhongi Shoji; Tanaka Satoshi; Ito Masamitsu; Sato Takashi; Fukuhara Kazuya


Archive | 2006

EXPOSURE SYSTEM, POLARIZATION MONITOR MASK AND POLARIZATION MONITOR METHOD

Sato Takashi; Fukuhara Kazuya; Asanuma Keita


Archive | 1997

METHOD AND APPARATUS FOR PLANARIZING SURFACE OF SEMICONDUCTOR SUBSTRATE

Sato Takashi; Okumura Katsuya; Iba Junichiro


Archive | 2015

HYDROGEN PRODUCTION SYSTEM USING SUNLIGHT

Sato Takashi; Kato Hiroyuki; Matsuda Junji; Tanaka Satoshi; Kazama Takuya; Todoroki Tetsuhide; Igawa Naoto; Tsukada Masaya; Nakaya Yoshiaki; Moriguchi Masaru; Morimoto Mayo; Sakai Tsutomu


Archive | 2007

Ausrichtungsverfahren, Verfahren zur Inspektion von Überlagerungsfehlern und Photomaske

Sato Takashi; Inoue Soichi

Collaboration


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