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Sato Takashi

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Publication

Featured researches published by Sato Takashi.

Archive | 1999

Pattern-measuring method

Nomura Hiroshi; Sato Takashi; Kono Takuya; Iba Junichiro

Archive | 2009

SIMULATION METHOD AND PROGRAM FOR SIMULATION

Sanhongi Akiko; Sato Takashi

Archive | 2006

EXPOSURE SYSTEM, AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE

Kono Takuya; Sato Takashi; Touki Tatsuhiko; Inoue Soichi; Sanhongi Shoji

Archive | 2010

INSPECTION METHOD OF EXPOSURE DEVICE

Kasa Kentaro; Fukuhara Kazuya; Sato Takashi

Archive | 2008

CORRECTION METHOD FOR OPTICAL PROXIMITY EFFECT

Fukuhara Kazuya; Touki Tatsuhiko; Kotani Toshiya; Tanaka Satoshi; Sato Takashi; Sanhongi Akiko; Satake Masaki

Archive | 2008

METHOD FOR INSPECTING LOCAL VARIANCE IN MASK PATTERN, METHOD FOR ASSURING LOCAL VARIANCE, AND INSPECTION PROGRAM FOR LOCAL VARIANCE

Sanhongi Akiko; Sanhongi Shoji; Tanaka Satoshi; Ito Masamitsu; Sato Takashi; Fukuhara Kazuya

Archive | 2006

EXPOSURE SYSTEM, POLARIZATION MONITOR MASK AND POLARIZATION MONITOR METHOD

Sato Takashi; Fukuhara Kazuya; Asanuma Keita

Archive | 1997

METHOD AND APPARATUS FOR PLANARIZING SURFACE OF SEMICONDUCTOR SUBSTRATE

Sato Takashi; Okumura Katsuya; Iba Junichiro

Archive | 2015

HYDROGEN PRODUCTION SYSTEM USING SUNLIGHT

Sato Takashi; Kato Hiroyuki; Matsuda Junji; Tanaka Satoshi; Kazama Takuya; Todoroki Tetsuhide; Igawa Naoto; Tsukada Masaya; Nakaya Yoshiaki; Moriguchi Masaru; Morimoto Mayo; Sakai Tsutomu

Archive | 2007

Ausrichtungsverfahren, Verfahren zur Inspektion von Überlagerungsfehlern und Photomaske

Sato Takashi; Inoue Soichi

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Fukuhara Kazuya

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Tanaka Satoshi

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Kotani Toshiya

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Satake Masaki

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