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Dive into the research topics where Scott J. Deboer is active.

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Featured researches published by Scott J. Deboer.


european solid-state device research conference | 2014

A semiconductor memory development and manufacturing perspective

Greg Atwood; Scott J. Deboer; Kirk Prall; Linda K. Somerville

Semiconductor memories are growing in importance as they are now fundamental in every electronic system and offer new manufacturing and development challenges and opportunities. From a manufacturing point of view, the industry has undergone consolidation and today very few players are able to supply the high wafer volumes required by the global market. From a technology development point of view, new applications requiring lower power, higher memory density and improved performance creates opportunities for alternative memory technologies. Moreover, the shift to 3-dimensional integration and to new system architectures result in both manufacturing and technology challenges.


Archive | 2006

Methods of forming capacitors

Husam N. Alshareef; Scott J. Deboer; F. Daniel Gealy; Randhir P. S. Thakur


Archive | 1999

Semiconductor structure having a doped conductive layer

Yongjun Hu; Pai-Hung Pan; Er-Xuan Ping; Randhir P. S. Thakur; Scott J. Deboer


Archive | 1998

Methods of forming carbon-containing layers

John T. Moore; Guy T. Blalock; Scott J. Deboer


Archive | 2004

Methods and apparatus for forming a high dielectric film and the dielectric film formed thereby

Scott J. Deboer; Randhir P. S. Thakur


Archive | 2001

Method and structure for reducing contact aspect ratios

Scott J. Deboer; Vishnu K. Agarwal


Archive | 2001

Batch processing for semiconductor wafers to form aluminum nitride and titanium aluminum nitride

Brenda D. Kraus; John T. Moore; Scott J. Deboer


Archive | 1999

Semiconductor circuit components and capacitors

Scott J. Deboer; F. Daniel Gealy; Randhir P. S. Thakur


Archive | 2002

Semiconductor processing methods of transferring patterns from patterned Photoresists to materials, and structures comprising silicon nitride

Scott J. Deboer; John T. Moore


Archive | 1999

Apparatus for forming a high dielectric film

Scott J. Deboer; Randhir P. S. Thakur

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Husam N. Alshareef

King Abdullah University of Science and Technology

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