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Klaus F. Schuegraf

Micron Technology

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Publication

Featured researches published by Klaus F. Schuegraf.

IEEE Transactions on Electron Devices | 1994

Effects of temperature and defects on breakdown lifetime of thin SiO/sub 2/ at very low voltages

Klaus F. Schuegraf; Chenming Hu

Archive | 2004

Shallow trench isolation using low dielectric constant insulator

Klaus F. Schuegraf; Aftab Ahmad

Archive | 1995

Semiconductor processing method of providing a conductively doped layer of hemispherical grain polysilicon

John K. Zahurak; Klaus F. Schuegraf; Randhir P. S. Thakur

Archive | 1995

Uniform dielectric film deposition on textured surfaces

Klaus F. Schuegraf; Pierre C. Fazan

Archive | 1995

Semiconductor processing method of forming a tantalum oxide containing capacitor

Klaus F. Schuegraf

Archive | 1997

Rugged metal electrodes for metal-insulator-metal capacitors

Klaus F. Schuegraf

Archive | 2001

Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures

Klaus F. Schuegraf; Carl Powell; Randhir P. S. Thakur

Archive | 1996

DRAM capacitors made from silicon-germanium and electrode-limited conduction dielectric films

Scott J. Deboer; Klaus F. Schuegraf; Ronald A. Weimer; Randhir P. S. Thakur

Archive | 1995

High pressure reoxidation anneal of silicon nitride for reduced thermal budget silicon processing

Klaus F. Schuegraf; Randhir P. S. Thakur; Pierre C. Fazan

Archive | 2000

Method of monitoring a process of manufacturing a semiconductor wafer including hemispherical grain polysilicon

Tyler A. Lowrey; Klaus F. Schuegraf; Randhir P. S. Thakur

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Collaboration

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Randhir P. S. Thakur

Micron Technology

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Pierre C. Fazan

Micron Technology

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Scott J. Deboer

Micron Technology

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Aftab Ahmad

Micron Technology

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Mike Violette

Micron Technology

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Nanseng Jeng

Micron Technology

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Thomas A. Figura

Micron Technology

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Fernando Gonzales

Micron Technology

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John K. Zahurak

Micron Technology

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Bob Carstensen

Micron Technology

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