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Seung-pil Chung

Samsung

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Publication

Featured researches published by Seung-pil Chung.

Archive | 2001

Method of removing contaminants from integrated circuit substrates using cleaning solutions

Seung-pil Chung; Kyu-hwan Chang; Young-min Kwon; Sang-lock Hah

Archive | 2001

Method of manufacturing a contact of a semiconductor device using cluster apparatus having at least one plasma pretreatment module

Seung-pil Chung; Kyeong-koo Chi; Ji-soo Kim; Changwoong Chu; Sang-Hun Seo

Archive | 2000

Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system

Sang-Hun Seo; Kyeong-koo Chi; Ji-soo Kim; Seung-pil Chung

Archive | 2005

Method of fabricating flash memory device including control gate extensions

Dong-chan Kim; Chang-Jin Kang; Kyeong-koo Chi; Seung-pil Chung

Archive | 2001

Method of manufacturing a semiconductor device having contact pads

Seung-pil Chung; Kyeong-koo Chi; Jung-Sik Jeon

Archive | 2010

Semiconductor device having fine pattern wiring lines integrally formed with contact plug and method of manufacturing same

Dong-Seok Lee; Seung-pil Chung; Ji-Young Lee

Archive | 2006

Method of forming a fine pattern

Seok-Hyun Lim; Chang-Jin Kang; Gyung-jin Min; Seung-pil Chung; Dong-Seok Lee

Archive | 2001

Method of manufacturing a semiconductor capacitor having a hemispherical grain layer using a dry cleaning process

Seung-pil Chung; Kyu-hwan Chang; Young-min Kwon; Sang-lock Hah

Archive | 2006

Semiconductor etching apparatus and method of etching semiconductor devices using same

Kyeong-koo Chi; Seung-pil Chung

Archive | 2007

METHOD OF FABRICATING A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

Seung-pil Chung; Dong-Chan Kim; Chang-Jin Kang; Heung-Sik Park

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Collaboration

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Kyeong-koo Chi

Samsung

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Ji-soo Kim

Samsung

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Sang-Hun Seo

Samsung

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Dong-Seok Lee

Samsung

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Hong Cho

Samsung

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Chang-Jin Kang

Samsung

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Changwoong Chu

North Carolina State University

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Kyu-hwan Chang

Samsung

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Dong-Chan Kim

Samsung

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Heung-Sik Park

Samsung

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