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Shigeto Kamata

Canon Inc.

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Publication

Featured researches published by Shigeto Kamata.

Archive | 1997

Linear motor, and stage device and exposure apparatus provided with the same

Shigeto Kamata; Toshio Matsuki

Archive | 1994

Weight supporting apparatus

Kotaro Akutsu; Eiji Osanai; Shigeto Kamata

Archive | 1998

Linear motor, stage device, and exposing device

Shingo Nagai; Toyoshige Sasaki; Shigeto Kamata

Archive | 2002

Voltage-applying probe, apparatus for manufacturing electron source using the probe, and method for manufacturing electron source using the apparatus

Akihiro Kimura; Kazuhiro Oki; Shigeto Kamata

Archive | 1999

LINEAR MOTOR, AND STAGE SYSTEM AND ALIGNER PROVIDED WITH THE MOTOR

Shigeto Kamata; Toshio Matsuki; 敏雄 松木; 重人 鎌田

Archive | 1995

Moving magnet type multi-phase linear motor with vibration suppression and coil cooling means

Shigeto Kamata; Toshikazu Sakai

Archive | 2004

Heating/cooling method, manufacturing method of image displaying apparatus, heating/cooling apparatus, and heating/cooling processing apparatus

Masanao Yoshimura; Takeshi Yakou; Akihiko Komura; Akihiro Kimura; Shigeto Kamata

Archive | 2004

Thermal treatment equipment, thermal treatment method and manufacturing method of image display apparatus

Shigeto Kamata; Akihiro Kimura

Archive | 2000

Linear motor, and stage apparatus and exposure apparatus using the same

Shigeto Kamata

Archive | 2004

Heating method, heating apparatus, and production method of image display apparatus

Akihiro Kimura; Shigeto Kamata

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Collaboration

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Akihiro Kimura

Canon Inc.

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Kazuhiro Oki

Canon Inc.

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Eiji Osanai

Canon Inc.

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Kotaro Akutsu

Canon Inc.

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Mitsutoshi Hasegawa

Canon Inc.

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Toshio Matsuki

Canon Inc.

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Yasuo Ohashi

Canon Inc.

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Kazumasa Takatsu

Canon Inc.

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Kazuo Koyanagi

Canon Inc.

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Masahiro Tagawa

Canon Inc.

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