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Shingo Hishiya

Tokyo Electron

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Publication

Featured researches published by Shingo Hishiya.

Archive | 2004

Method and apparatus for processing polysilazane film

Shingo Hishiya; Kimiya Aoki; Masahisa Watanabe

Archive | 2003

Semiconductor manufacturing method and semiconductor manufacturing apparatus

Satohiko Hoshino; Shingo Hishiya

Archive | 2011

SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ADSORPTION SITE BLOCKING ATOMIC LAYER DEPOSITION METHOD

Toshiyuki Hirota; Takakazu Kiyomura; Yuichiro Morozumi; Shingo Hishiya

Archive | 2009

REACTION TUBE AND HEAT PROCESSING APPARATUS FOR A SEMICONDUCTOR PROCESS

Hirofumi Kaneko; Hisashi Inoue; Keishi Shionaga; Shingo Hishiya; Atsushi Endoh

Archive | 2002

Oxide film forming method

Shingo Hishiya; Koji Akiyama; Yoshikazu Furusawa; Kimiya Aoki

Archive | 2013

Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitor

Yu Wamura; Koji Akiyama; Shingo Hishiya; Katsushige Harada

Archive | 2012

METHOD OF FORMING TITANIUM OXIDE FILM HAVING RUTILE CRYSTALLINE STRUCTURE

Takakazu Kiyomura; Toshiyuki Hirota; Yuichiro Morozumi; Shingo Hishiya

Archive | 2012

Film Forming Method, Film Forming Apparatus, and Storage Medium

Yuichiro Morozumi; Takuya Sugawara; Koji Akiyama; Shingo Hishiya; Toshiyuki Hirota; Takakazu Kiyomura

Archive | 2011

Liquid processing method, recording medium having recorded program for executing liquid processing method therein and liquid processing apparatus

Tsuyoshi Mizuno; Hiromitsu Namba; Yuichiro Morozumi; Shingo Hishiya; Katsushige Harada; Fumiaki Hayase

Archive | 2003

Treatment method and apparatus of substrate

Shingo Hishiya; Misako Saito; Syoichi Sato; Kota Umezawa; Yoshikazu Furusawa; Teruyuki Hayashi

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Yuichiro Morozumi

Tokyo Electron

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Katsushige Harada

Tokyo Electron

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Koji Akiyama

Tokyo Electron

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Takakazu Kiyomura

Tokyo Electron

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Toshiyuki Hirota

Tokyo Electron

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Keisuke Suzuki

Daiichi Sankyo

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Kimiya Aoki

Tokyo Electron

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Kohei Fukushima

Tokyo Electron

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Satohiko Hoshino

Tokyo Electron

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Takuya Sugawara

Tokyo Electron

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