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Dive into the research topics where Noriyuki Anai is active.

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Featured researches published by Noriyuki Anai.


Archive | 1989

Resist process apparatus

Masami Akimoto; Yoshio Kimura; Osamu Hirakawa; Noriyuki Anai; Masanori Tateyama; Yasuhiro Sakamoto


Archive | 1990

COATING APPARATUS AND METHOD FOR APPLYING A LIQUID TO A SEMICONDUCTOR WAFER INCLUDING SELECTING A NOZZLE ON A STAND BY STATE

Mitsuru Ushijima; Osamu Hirakawa; Masami Akimoto; Yoshio Kimura; Noriyuki Anai


Archive | 1999

Coating method and apparatus for semiconductor process

Kiyohisa Tateyama; Kimio Motoda; Noriyuki Anai


Archive | 1996

Apparatus for coating resist on substrate

Kimio Motoda; Kiyohisa Tateyama; Noriyuki Anai


Archive | 1994

Hydrophobic processing apparatus including a liquid delivery system

Tsutae Omori; Kouji Harada; Takami Satoh; Noriyuki Anai; Masafumi Nomura


Archive | 1999

Substrate treating method

Hideyuki Takamori; Kiyohisa Tateyama; Kengo Mizosaki; Noriyuki Anai; Yoshitaka Matsuda


Archive | 1993

Device and method for scrubbing and cleaning substrate

Kouichi Tanoue; Shinzi Kitamura; Noriyuki Anai; Takami Satoh; Takayuki Tomoeda; Tatsuya Iwasaki; Kengo Mizosaki


Archive | 1994

Method for scrubbing and cleaning substrate

Kouichi Tanoue; Shinzi Kitamura; Noriyuki Anai; Takami Satoh; Takayuki Tomoeda; Tatsuya Iwasaki; Kengo Mizosaki


Archive | 2000

Apparatus for removing coated film from peripheral portion of substrate

Noriyuki Anai


Archive | 1997

Method for washing objects

Shinya Murakami; Yuuji Kamikawa; Sinichiro Izumi; Noriyuki Anai; Takami Satoh; Hirofumi Shiraishi; Koji Harada; Takayuki Tomoeda; Hiroshi Tanaka

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