Shinji Nagashima | Researchain

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Featured researches published by Shinji Nagashima.

Archive | 2003

Gas treatment apparatus

Kazuhiro Takeshita; Shinji Nagashima; Yoji Mizutani; Kyoshige Katayama

Archive | 2007

Substrate processing system

Keizo Hasebe; Shinji Nagashima; Norio Semba; Masami Akimoto; Yoshio Kimura; Naruaki Iida; Kouji Harada; Issei Ueda; Nobuo Konishi

Archive | 2004

Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film

Kazuhiro Takeshita; Shinji Nagashima; Makoto Muramatsu; Yoji Mizutani; Kazutoshi Yano; Kyoshige Katayama

Archive | 2001

Heat treatment apparatus and method

Takashi Tanaka; Shinji Nagashima; Hiroyuki Sakai

Archive | 2002

Apparatus and method for forming coating film

Takashi Tanaka; Shinji Nagashima

Archive | 1998

Spin coating apparatus including aging unit and solvent replacement unit

Kazuhiro Takeshita; Shinji Nagashima; Makoto Muramatsu; Yoji Mizutani; Kazutoshi Yano; Kyoshige Katayama

Archive | 1994

Method and device for treatment

栄一 ▲せき▼本; Kazuyuki Goto; Keizo Hasebe; Yoshio Kimura; Kimiharu Matsumura; Hiroshi Murakami; Shinji Nagashima; Shinji Okada; Eiichi Sekimoto; Norio Senba; Tadayuki Yamaguchi; 教雄千場; 忠之山口; 慎二岡田; 一幸後藤; 義雄木村; 寛村上; 公治松村; 慎二永嶋; 圭蔵長谷部

Archive | 2003