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Yoji Mizutani

Tokyo Electron

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Publication

Featured researches published by Yoji Mizutani.

Archive | 2003

Gas treatment apparatus

Kazuhiro Takeshita; Shinji Nagashima; Yoji Mizutani; Kyoshige Katayama

Archive | 2004

Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film

Kazuhiro Takeshita; Shinji Nagashima; Makoto Muramatsu; Yoji Mizutani; Kazutoshi Yano; Kyoshige Katayama

Archive | 1998

Spin coating apparatus including aging unit and solvent replacement unit

Kazuhiro Takeshita; Shinji Nagashima; Makoto Muramatsu; Yoji Mizutani; Kazutoshi Yano; Kyoshige Katayama

Archive | 2001

Heat treatment method, heat treatment apparatus and treatment system

Yuji Matsuyama; Yoji Mizutani; Shinji Nagashima; Akira Yonemizu

Archive | 2000

Film forming method and film forming system

Takayuki Toshima; Nobuo Konishi; Yoji Mizutani

Archive | 1999

Film forming apparatus, substrate conveying apparatus, film forming method, and substrate conveying method

Kazuhiro Takeshita; Shinji Nagashima; Yoji Mizutani

Archive | 1998

Method for coating a substrate and apparatus for coating and setting the coating

Kyoshige Katayama; Yoji Mizutani; Makoto Muramatsu; Shinji Nagashima; Kazuhiro Takeshita; Kazutoshi Yano

Archive | 1998

Apparatus for setting a coating and apparatus for coating

Kazuhiro Takeshita; Shinji Nagashima; Makoto Muramatsu; Yoji Mizutani; Kazutoshi Yano; Kyoshige Katayama

Archive | 2005

Aging unit and processing method

Kazuhiro Takeshita; Shinji Nagashima; Makoto Muramatsu; Yoji Mizutani; Kazutoshi Yano; Kyoshige Katayama

Archive | 1998

Procédé pour revêtir un substrat et appareil pour revêtir et pour le mûrissage du revêtement

Kyoshige Katayama; Yoji Mizutani; Makoto Muramatsu; Shinji Nagashima; Kazuhiro Takeshita; Kazutoshi Yano

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Collaboration

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Shinji Nagashima

Tokyo Electron

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Kazuhiro Takeshita

Tokyo Electron

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Kyoshige Katayama

Tokyo Electron

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Kazutoshi Yano

Tokyo Electron

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Makoto Muramatsu

Tokyo Electron

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Akira Yonemizu

Tokyo Electron

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Nobuo Konishi

Tokyo Electron

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Takayuki Toshima

Tokyo Electron

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Yuji Matsuyama

Tokyo Electron

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