Kazuhiro Takeshita
Tokyo Electron
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Publication
Featured researches published by Kazuhiro Takeshita.
Japanese Journal of Applied Physics | 2000
Shinichi Ito; Tatsuhiko Ema; Takahiro Kitano; Kohtaro Sho; Yukihiko Esaki; Masateru Morikawa; Kazuhiro Takeshita; Masami Akimoto; Katsuya Okumura
A novel nozzle-scan coating (NS-coating) method is useful for reducing the coated volume and its cost. We define the (waste-fluid rate) WFR as the ratio of the waste fluid to the fluid supplied on the wafer. In conventional spin-coating, the WFR is about 1500%. In the case of the extrusion-spin coating, the WFR decreases to 203%. But using the NS-coating with low speed and large acceleration, the WFR of the raw materials drastically decreased to 30%. This paper introduces some lithographic performances of NS-coating film of KrF chemical amplified resist that was coated with low WFR condition.
Archive | 2003
Kazuhiro Takeshita; Shinji Nagashima; Yoji Mizutani; Kyoshige Katayama
Archive | 2012
Takahiro Kitano; Masateru Morikawa; Masami Akimoto; Kazuhiro Takeshita
Archive | 2004
Kazuhiro Takeshita; Shinji Nagashima; Makoto Muramatsu; Yoji Mizutani; Kazutoshi Yano; Kyoshige Katayama
Archive | 2000
Takahiro Kitano; Masateru Morikawa; Yukihiko Esaki; Nobukazu Ishizaka; Norihisa Koga; Kazuhiro Takeshita; Hirofumi Ookuma; Masami Akimoto
Archive | 2002
Takahiro Kitano; Masateru Morikawa; Yukihiko Esaki; Nobukazu Ishizaka; Norihisa Koga; Kazuhiro Takeshita; Hirofumi Ookuma; Masami Akimoto
Archive | 2005
Takahiro Kitano; Masateru Morikawa; Yukihiko Esaki; Nobukazu Ishizaka; Norihisa Koga; Kazuhiro Takeshita; Hirofumi Ookuma; Masami Akimoto
Archive | 1998
Kazuhiro Takeshita; Shinji Nagashima; Makoto Muramatsu; Yoji Mizutani; Kazutoshi Yano; Kyoshige Katayama
Archive | 2002
Shinji Kobayashi; Takahiro Kitano; Masateru Morikawa; Kazuhiro Takeshita; Yoshiyuki Kawafuchi
Archive | 1999
Kazuhiro Takeshita; Shinji Nagashima; Yoji Mizutani
