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Shinji Ohishi

Canon Inc.

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Publication

Featured researches published by Shinji Ohishi.

Archive | 2000

Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device

Hirohito Itoh; Shinji Ohishi

Archive | 1994

Stage device and pattern transfer system using the same

Hirohito Itoh; Shinji Ohishi; Kazunori Iwamoto; Nobushige Korenaga; Youzou Fukagawa; Toshiya Asano; Satoru Takahashi

Archive | 1998

Stage system and exposure apparatus with the same

Shin Matsui; Shinji Ohishi; Eiji Osanai; Tadayuki Kubo

Archive | 1990

Device for positioning control

Shinji Ohishi; Kotaro Akutsu; Toshikazu Sakai

Archive | 1987

Control system for a servomotor

Shinji Ohishi; Makoto Higomura

Archive | 1994

Positioning table device including correction of energization electric current to selected coils of a permanent magnet of a drive device

Shinji Ohishi

Archive | 2006

Alignment stage apparatus

Shinji Ohishi

Archive | 2008

Stage apparatus, exposure apparatus, and device manufacturing method

Shinji Ohishi

Archive | 2005

Alignment stage apparatus, exposure apparatus, and semiconductor device manufacturing method

Shinji Ohishi

Archive | 2006

Stage device for positioning an object, in which a static pressure bearing and a pressurizing magnet suspend a slider

Shinji Ohishi

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Collaboration

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Hirohito Itoh

Canon Inc.

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Eiji Osanai

Canon Inc.

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Go Tsuchiya

Canon Inc.

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Kazunori Iwamoto

Canon Inc.

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Kimitaka Ozawa

Canon Inc.

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Kotaro Akutsu

Canon Inc.

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Makoto Higomura

Canon Inc.

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Nobushige Korenaga

Canon Inc.

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Satoru Takahashi

Canon Inc.

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Shin Matsui

Canon Inc.

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