Shozo Muraoka

Method and apparatus for manufacturing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers manufactured by the same

Nitrogen doped single crystal silicon wafer with few defects and method for its production

Silicon single crystal wafer having few defects wherein nitrogen is doped and a method for producing it

Production of silicon single crystal having low crystal defect and silicon single crystal wafer produced therewith

Production of and production unit for silicon single crystal with few crystal defect, and silicon single crystal and silicon wafer produced thereby

Low defect density silicon single crystal wafer doped with nitrogen and its production

Silicon single crystal wafer with low content of crystal defect and its production

Crystal holding apparatus

Single-crystal silicon wafer having few crystal defects and method for manufacturing the same

Method for producing low defect silicon single crystal doped with nitrogen