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Shuji Akiyama

Tokyo Electron

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Publication

Featured researches published by Shuji Akiyama.

Archive | 2002

Automatic guided vehicle, automatic guided vehicle system and wafer carrying method

Isao Fukuda; Shuji Akiyama

Archive | 1990

Method of testing electrical characteristics of LCD with probe device

Shuji Akiyama

Archive | 2002

Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method

Toshihiko Iijima; Shuji Akiyama; Hiroki Hosaka; Takashi Nakao

Archive | 2009

Probing apparatus and probing method

Hiroki Hosaka; Shuji Akiyama; Tadashi Obikane

Archive | 2003

Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering method

Ki Sang Kang; Shuji Akiyama; Hiroki Hosaka

Archive | 2001

Conveyance system, conveyance method and vacuum holding apparatus for object to be processed, and centering method for water

Shuji Akiyama; Toshihiko Iijima; Hiroki Hosaka

Archive | 1995

Apparatus and method for testing semiconductor device

Takao Ishii; Shuji Akiyama; Hiroki Hosaka

Archive | 2008

Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer

Shuji Akiyama; Tadashi Obikane; Masaru Suzuki; Yasuhito Yamamoto; Kazuya Yano; Yuji Asakawa; Kazumi Yamagata; Shigeki Nakamura; Eiichi Matsuzawa; Kazuhiro Ozawa; Fumito Kagami; Shinji Kojima

Archive | 2006

CONVEYANCE METHOD FOR TRANSPORTING OBJECTS

Shuji Akiyama; Toshihiko Iijima; Hiroki Hosaka

Archive | 2005

Turning device for heavy object

Shuji Akiyama; Toshihiro Yudate; Hiroshi Yamada; Nobuhiro Kameda

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Collaboration

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Hiroki Hosaka

Tokyo Electron

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Toshihiko Iijima

Tokyo Electron

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Kazuya Yano

Tokyo Electron

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Tadashi Obikane

Tokyo Electron

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Hiroshi Yamada

Tokyo Electron

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Isao Fukuda

Tokyo Electron

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Nobuhiro Kameda

Tokyo Electron

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Toshihiro Yudate

Tokyo Electron

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Eiichi Matsuzawa

Tokyo Electron

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Fumito Kagami

Tokyo Electron

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