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Hiroki Hosaka

Tokyo Electron

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Publication

Featured researches published by Hiroki Hosaka.

Archive | 2002

Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method

Toshihiko Iijima; Shuji Akiyama; Hiroki Hosaka; Takashi Nakao

Archive | 2009

Probing apparatus and probing method

Hiroki Hosaka; Shuji Akiyama; Tadashi Obikane

Archive | 2003

Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering method

Ki Sang Kang; Shuji Akiyama; Hiroki Hosaka

Archive | 2001

Conveyance system, conveyance method and vacuum holding apparatus for object to be processed, and centering method for water

Shuji Akiyama; Toshihiko Iijima; Hiroki Hosaka

Archive | 1995

Apparatus and method for testing semiconductor device

Takao Ishii; Shuji Akiyama; Hiroki Hosaka

Archive | 2006

CONVEYANCE METHOD FOR TRANSPORTING OBJECTS

Shuji Akiyama; Toshihiko Iijima; Hiroki Hosaka

Archive | 2005

Substrate transfer apparatus and method, and storage medium

Hiroki Hosaka; Toshihiko Iijima; Shinya Shimizu

Archive | 2012

WAFER TRANSFER DEVICE

Hiroki Hosaka; Masahiko Akiyama

Archive | 2005

Device and method for transferring substrate, and storage medium

Hiroki Hosaka; Toshihiko Iijima; Shinya Shimizu; 広樹 保坂; 信也 清水; 俊彦 飯島

Archive | 2001

Workpiece transfer system, transfer method, vacuum chuck, and wafer centering method

Shuji Akiyama; Toshihiko Iijima; Hiroki Hosaka

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Collaboration

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Shuji Akiyama

Tokyo Electron

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Toshihiko Iijima

Tokyo Electron

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Tadashi Obikane

Tokyo Electron

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Shinya Shimizu

Tokyo Electron

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Ki Sang Kang

Tokyo Electron

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Masahiko Akiyama

Tokyo Electron

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Takao Ishii

Tokyo Electron

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