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Tadashi Obikane

Tokyo Electron

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Publication

Featured researches published by Tadashi Obikane.

Archive | 1996

Semiconductor wafer probing apparatus

Tadashi Obikane; Eiji Hayashi; Ryoichiro Koshi

Archive | 2010

FOUP OPENING/CLOSING DEVICE AND PROBE APPARATUS

Tadashi Obikane

Archive | 2009

Probing apparatus and probing method

Hiroki Hosaka; Shuji Akiyama; Tadashi Obikane

Archive | 2004

Load port capable of coping with different types of cassette containing substrates to be processed

Tadashi Obikane

Archive | 1990

Electric probing test machine

Tadashi Obikane; Hisashi Koike; Sumi Tanaka

Archive | 2008

TRANSFER AND INSPECTION DEVICES OF OBJECT TO BE INSPECTED

Tadashi Obikane

Archive | 2008

Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer

Shuji Akiyama; Tadashi Obikane; Masaru Suzuki; Yasuhito Yamamoto; Kazuya Yano; Yuji Asakawa; Kazumi Yamagata; Shigeki Nakamura; Eiichi Matsuzawa; Kazuhiro Ozawa; Fumito Kagami; Shinji Kojima

Archive | 2000

Probing apparatus and head plate opening/closing force-reducing mechanism

Tadashi Obikane; Masashi Shimizu

Archive | 2009

Wafer carrying-in/out machine

Hiroki Hosaka; Shuji Akiyama; Tadashi Obikane

Archive | 2010

PROBE APPARATUS AND SUBSTRATE TRANSFER METHOD

Tadashi Obikane; Kazuya Yano; Hiroshi Yamada; Masaru Suzuki; Yasuhito Yamamoto

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Collaboration

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Shuji Akiyama

Tokyo Electron

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Hiroki Hosaka

Tokyo Electron

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Eiji Hayashi

Tokyo Electron

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Kazuya Yano

Tokyo Electron

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Masaru Suzuki

Tokyo Electron

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Ryoichiro Koshi

Tokyo Electron

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Yasuhito Yamamoto

Tokyo Electron

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Eiichi Matsuzawa

Tokyo Electron

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Fumito Kagami

Tokyo Electron

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Hiroshi Yamada

Tokyo Electron

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