Sonja Knies

Multiphysics investigation of gas sensor packages

A miniaturized ozone gas sensor working with UV-light was investigated and aspects of its heterointegration were reviewed, simulated and analyzed. We analyzed possible interactions of the integration of functional optical elements together with MEMS-based physical sensors. Gas diffusion into the package and light propagation inside the package were simulated amongst well-known simulations such as heat distribution in the package. As a result of this investigation design constraints and methodology to realize such integration are showed in this paper. Suggestions for technology and component arrangement are given in order to guarantee proper performance of the integrated sensors.

Further miniaturization of O 3 -sensors for smart integration - heterointegration

This paper focuses on packaging and miniaturization of ozone sensors and review aspects of their heterointegration together with other physical sensors for consumer electronics (CE) and internet of things (IoT) applications. We present a concept and simulations of an optically regenerated gas sensor for ozone detection [1]. A demonstrator of innovative stand-alone miniaturized gas sensor according to a previously evaluated concept [2] is shown and measured performance is compared to an unpackaged sensor. In this work we also evaluate the impact of the integration of such sensor together with other environmental sensors i.e. pressure sensor. Measured is the performance of the pressure sensors with and without ozone sensor elements.