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Souichi Fukaya

Shin-Etsu Chemical

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Publication

Featured researches published by Souichi Fukaya.

Archive | 2013

PHOTOMASK BLANK AND METHOD FOR MANUFACTURING PHOTOMASK

Souichi Fukaya; Hideo Nakagawa; Kouhei Sasamoto

Archive | 2011

PHOTOMASK BLANK, PROCESS FOR PRODUCTION OF PHOTOMASK, AND CHROMIUM-CONTAINING MATERIAL FILM

Hiroki 吉川 博樹 Yoshikawa; Souichi Fukaya; Yukio 稲月 判臣 Inazuki; Tsuneo Yamamoto; Hideo Nakagawa

Archive | 2013

Photomask Blank, Method For Manufacturing Photomask, And Method For Manufacturing Phase Shift Mask

Souichi Fukaya; Hideo Nakagawa; Kouhei Sasamoto

Archive | 2013

HALF-TONE PHASE SHIFT MASK BLANK AND METHOD FOR MANUFACTURING HALF-TONE PHASE SHIFT MASK

Souichi Fukaya; Hideo Nakagawa; Kouhei Sasamoto

Archive | 2013

PHOTOMASK BLANK MANUFACTURING METHOD, PHOTOMASK BLANK, PHOTOMASK, AND PATTERN TRANSFER METHOD

Hiroki Yoshikawa; Souichi Fukaya; Yukio Inazuki; Hideo Nakagawa

Archive | 2013

Blank for mold production and method for manufacturing mold

Souichi Fukaya; Hideo Nakagawa; Kouhei Sasamoto

Archive | 2017

PHOTOMASK BLANK, MAKING METHOD, AND PHOTOMASK

Souichi Fukaya; Shinichi Igarashi; Takashi Yoshii

Archive | 2017

INORGANIC MATERIAL FILM, PHOTOMASK BLANK, AND METHOD FOR MANUFACTURING PHOTOMASK

Souichi Fukaya; Kouhei Sasamoto; Hideo Nakagawa

Archive | 2017

Photomask blank and method for preparing photomask

Kouhei Sasamoto; Souichi Fukaya; Yukio Inazuki

Archive | 2016

Film de matériau inorganique, ébauche de photomasque et procédé de fabrication d'un photomasque

Souichi Fukaya; Kouhei Sasamoto; Hideo Nakagawa

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Collaboration

Dive into the Souichi Fukaya's collaboration.

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Hideo Nakagawa

Shin-Etsu Chemical

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Kouhei Sasamoto

Shin-Etsu Chemical

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Tsuneo Yamamoto

Shin-Etsu Chemical

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Yukio Inazuki

East Tennessee State University

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Hiroki Yoshikawa

Hitachi

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Yukio Inazuki

East Tennessee State University

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Hiroki Yoshikawa

Hitachi

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Hideo Kaneko

Shin-Etsu Chemical

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Hiroki 吉川 博樹 Yoshikawa

Shin-Etsu Chemical

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Shinichi Igarashi

Shin-Etsu Chemical

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