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Kouhei Sasamoto

Shin-Etsu Chemical

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Publication

Featured researches published by Kouhei Sasamoto.

Archive | 2013

PHOTOMASK BLANK AND METHOD FOR MANUFACTURING PHOTOMASK

Souichi Fukaya; Hideo Nakagawa; Kouhei Sasamoto

Archive | 2013

Photomask Blank, Method For Manufacturing Photomask, And Method For Manufacturing Phase Shift Mask

Souichi Fukaya; Hideo Nakagawa; Kouhei Sasamoto

Archive | 2013

HALF-TONE PHASE SHIFT MASK BLANK AND METHOD FOR MANUFACTURING HALF-TONE PHASE SHIFT MASK

Souichi Fukaya; Hideo Nakagawa; Kouhei Sasamoto

Archive | 2014

Halftone phase shift photomask blank, halftone phase shift photomask and pattern exposure method

Yukio Inazuki; Toyohisa Sakurada; Hideo Kaneko; Takuro Kosaka; Kouhei Sasamoto

Archive | 2013

Blank for mold production and method for manufacturing mold

Souichi Fukaya; Hideo Nakagawa; Kouhei Sasamoto

Archive | 2017

INORGANIC MATERIAL FILM, PHOTOMASK BLANK, AND METHOD FOR MANUFACTURING PHOTOMASK

Souichi Fukaya; Kouhei Sasamoto; Hideo Nakagawa

Archive | 2017

Photomask blank and method for preparing photomask

Kouhei Sasamoto; Souichi Fukaya; Yukio Inazuki

Archive | 2016

Film de matériau inorganique, ébauche de photomasque et procédé de fabrication d'un photomasque

Souichi Fukaya; Kouhei Sasamoto; Hideo Nakagawa

Archive | 2016

Rohling für halbton-phasenschiebermaske und halbton-phasenschiebermaske

Kouhei Sasamoto; Takuro Kosaka; Yukio Inazuki; Hideo Kaneko

Archive | 2016

Ébauche de masque de déphasage à tramage et un tel masque

Kouhei Sasamoto; Takuro Kosaka; Yukio Inazuki; Hideo Kaneko

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Collaboration

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Souichi Fukaya

Shin-Etsu Chemical

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Hideo Nakagawa

Shin-Etsu Chemical

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Hideo Kaneko

Shin-Etsu Chemical

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Yukio Inazuki

Shin-Etsu Chemical

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Takuro Kosaka

Shin-Etsu Chemical

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Yukio Inazuki

Shin-Etsu Chemical

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Toyohisa Sakurada

Shin-Etsu Chemical

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