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Eugene P. Marsh

Micron Technology

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Publication

Featured researches published by Eugene P. Marsh.

Archive | 2006

Atomic layer deposition methods

Eugene P. Marsh; Brian A. Vaartstra; Paul Castrovillo; Cem Basceri; Garo J. Derderian; Gurtej S. Sandhu

Archive | 2001

Planarization of non-planar surfaces in device fabrication

Eugene P. Marsh

Archive | 2000

Methods for preparing ruthenium metal films

Brian A. Vaartstra; Eugene P. Marsh

Archive | 2004

Deposition methods using heteroleptic precursors

Brian A. Vaartstra; Donald L. Westmoreland; Eugene P. Marsh; Stefan Uhlenbrock

Archive | 2001

Method for producing low carbon/oxygen conductive layers

Eugene P. Marsh

Archive | 1998

Methods for preparing ruthenium oxide films

Brian A. Vaartstra; Eugene P. Marsh

Archive | 2004

Surface treatment of an oxide layer to enhance adhesion of a ruthenium metal layer

Eugene P. Marsh; Brenda D. Kraus

Archive | 2007

Registered structure formation via the application of directed thermal energy to diblock copolymer films

Dan B. Millward; Eugene P. Marsh

Archive | 2001

Method of fabricating an SrRuO3 film

Eugene P. Marsh

Archive | 2002

Methods for planarization of non-planar surfaces in device fabrication

Eugene P. Marsh

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Collaboration

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Stefan Uhlenbrock

Micron Technology

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Brenda D. Kraus

Micron Technology

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Brian A. Vaartstra

Micron Technology

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Timothy A. Quick

Micron Technology

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Gurtej S. Sandhu

Micron Technology

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Dan B. Millward

Micron Technology

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Cem Basceri

Micron Technology

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David R. Atwell

Micron Technology

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Donald L. Westmoreland

Micron Technology

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Garo J. Derderian

Micron Technology

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