Stefan Zollner

Growth and strain compensation effects in the ternary Si1−x−yGexCy alloy system

Strain compensation is an important aspect of heterostructure engineering. In this letter, we discuss the synthesis of pseudomorphic Si1−yCy and Si1−x−yGexCy alloy layers on a silicon (100) substrate by molecular beam epitaxy using solid sources and the controlled strain compensation that results from the introduction of the ternary system. The introduction of C into substitutional sites in the crystal lattice is kinetically stabilized by low‐temperature growth conditions (400–550 °C) against thermodynamically favored silicon‐carbide phases. The lattice constant in Ge is about 4% larger than in Si, whereas in diamond it is 52% smaller. Consequently, the compressive strain caused by 10.8% Ge in a pseudomorphic Si1−xGex alloy can be compensated by adding about 1% carbon into substitutional lattice sites of the film assuming Vegard’s law of linear change of the lattice constant in the alloy as a function of the composition. Using x‐ray diffraction, we observe a partial strain compensation in Si0.75−yGe0.25Cy...

Ge-Sn semiconductors for band-gap and lattice engineering

We describe a class of Si-based semiconductors in the Ge1−xSnx system. Deuterium-stabilized Sn hydrides provide a low-temperature route to a broad range of highly metastable compositions and structures. Perfectly epitaxial diamond-cubic Ge1−xSnx alloys are grown directly on Si(100) and exhibit high thermal stability, superior crystallinity, and crystallographic and optical properties, such as adjustable band gaps and lattice constants. These properties are completely characterized by Rutherford backscattering, low-energy secondary ion mass spectrometry, high-resolution transmission electron microscopy, x-ray diffraction (rocking curves), as well as infrared and Raman spectroscopies and spectroscopic ellipsometry. Ab initio density functional theory simulations are also used to elucidate the structural and spectroscopic behavior.

Model dielectric functions for native oxides on compound semiconductors

Analytical models with eight parameters have been found which describe the dielectric functions of native or electrochemically grown oxide layers on the compound semiconductors GaP, GaAs, GaSb, InP, InAs, and InSb in the 1.6 to 5.6 eV photon energy range. These model functions agree with the experimental optical constants to within the accuracy of the measurements. They will be useful for the design and analysis of semiconductor laser structures, solar cells, and other electro‐optical devices.

Visible and ultraviolet Raman scattering studies of Si1−xGex alloys

We report Raman studies of the Si–Si phonon band in Si1−xGex alloys, where the excitation is by visible and ultraviolet (351 nm) light. At a wavelength 351 nm, the optical penetration depth is extremely shallow (≈5 nm). By varying the excitation from 351 to 514 nm, the optical penetration depth spans from 5 to 300 nm. Two sets of samples were examined. Thin layers grown using molecular beam epitaxy were coherently strained to match the lattice constant of the silicon substrate. Thick layers grown using organo–metallic chemical vapor deposition were strain relaxed. For the thin, strained layers, visible excitation produces a spectrum, which is a superposition of the substrate and the epilayer phonon bands. Reducing the wavelength (and, consequently, penetration depth) allows us to isolate the epilayer spectrum. Phonon energies obtained using all excitation wavelengths agree. We conclude that Raman scattering from these alloys using 351 nm laser light gives us bulk alloy properties pertinent to the near-sur...

Optical properties of bulk and thin-film SrTiO3 on Si and Pt

We have studied the optical properties (complex dielectric function) of bulk SrTiO3 and thin films on Si and Pt using spectroscopic ellipsometry over a very broad spectral range, starting at 0.03 eV [using Fourier transform infrared (FTIR) ellipsometry] to 8.7 eV. In the bulk crystals, we analyze the interband transitions in the spectra to determine the critical-point parameters. To interpret these transitions, we performed band structure calculations based on ab initio pseudopotentials within the local-density approximation. The dielectric function was also calculated within this framework and compared with our ellipsometry data. In the FTIR ellipsometry data, we notice a strong lattice absorption peak due to oxygen-related vibrations. Two longitudinal optic (LO) phonons were also identified. In SrTiO3 films on Si, the refractive index below the band gap decreases with decreasing thickness because of the increasing influence of the amorphous interfacial layer between the SrTiO3 film and the Si substrate....

Impact of titanium addition on film characteristics of HfO2 gate dielectrics deposited by atomic layer deposition

The impact of 8-to45-at.% Ti on physical and electrical characteristics of atomic-layer-deposited and annealed hafnium dioxide was studied using vacuum-ultraviolet spectroscopic ellipsometry, secondary ion mass spectroscopy, transmission electron microscopy, atomic force microscopy, x-ray diffraction, Rutherford backscattering spectroscopy, x-ray photoelectron spectroscopy, and x-ray reflectometry. The role of Ti addition on the electrical performance is investigated using molybdenum (Mo)-gated capacitors. The film density decreases with increasing Ti addition. Ti addition stabilizes the amorphous phase of HfO2, resulting in amorphous films as deposited. After a high-temperature annealing, the films transition from an amorphous to a polycrystalline phase. Orthorhombic Hf–Ti–O peaks are detected in polycrystalline films containing 33-at.% or higher Ti content. As Ti content is decreased, monoclinic HfO2 becomes the predominant microstructure. No TiSi is formed at the dielectric/Si interface, indicating fil...

High-quality AlN grown on Si(111) by gas-source molecular-beam epitaxy with ammonia

Hexagonal AlN layers were grown on Si(111) by gas-source molecular-beam epitaxy with ammonia. The transition between the (7×7) and (1×1) silicon surface reconstructions, at 1100 K, was used for in situ calibration of the substrate temperature. The initial deposition of Al, at 1130–1190 K, produced an effective nucleation layer for the growth of AlN. The Al layer also reduced islands of SiNx that might be formed due to background NH3 on the silicon surface prior to the onset of epitaxial growth. The transition to two-dimensional growth mode, under optimum conditions, was obtained after the initial AlN thickness of ∼7 nm.

Optical and structural properties of SixSnyGe1−x−y alloys

Single-phase SixSnyGe1−x−y alloys (x⩽0.25,y⩽0.11) were grown on Si using chemical vapor deposition. First principles simulations predict that these materials are thermodynamically accessible and yield lattice constants as a function of Si/Sn concentrations in good agreement with experiment. An empirical model derived from experimental SixGe1−x and SnyGe1−y binary data also provides a quantitative description of the composition dependence of the lattice parameters. Spectroscopic ellipsometry of selected samples yields dielectric functions indicating a band structure consistent with highly crystalline semiconductor materials of diamond symmetry. Incorporation of Si into SnyGe1−y leads to an additional reduction of the E2 critical point, as expected based on the E2 values of Si and Ge.

Dielectric functions of bulk 4H and 6H SiC and spectroscopic ellipsometry studies of thin SiC films on Si

Spectroscopic rotating-analyzer ellipsometry employing a compensator and optical transmission were used to measure the dielectric functions of bulk 4H and 6H SiC from 0.72 to 6.6 eV for light propagating nearly parallel to the hexagonal axis. The measurements below the band gap show the presence of a thin surface layer, which was modeled as SiO2. The data are similar to results for cubic (3C) and 6H SiC from the literature, but differences are notable, particularly above 4 eV. At 5.56 eV, we observe a critical point in 4H SiC, which is assigned to direct interband transitions along the U=M−L axis in the hexagonal Brillouin zone after comparison with band structure calculations. No evidence for direct transitions below 6.5 eV was found in 6H SiC. We apply our results to the analysis of a 4H SiC film on insulator (SiCOI) produced by high-dose hydrogen implantation and direct wafer bonding on Si. For comparison, we also studied a 1 μm thick epitaxial layer of 3C SiC on Si, where the interference oscillations...

Versatile buffer layer architectures based on Ge1−xSnx alloys

We describe methodologies for integration of compound semiconductors with Si via buffer layers and templates based on the GeSn system. These layers exhibit atomically flat surface morphologies, low defect densities, tunable thermal expansion coefficients, and unique ductile properties, which enable them to readily absorb differential stresses produced by mismatched overlayers. They also provide a continuous selection of lattice parameters higher than that of Ge, which allows lattice matching with technologically useful III-V compounds. Using this approach we have demonstrated growth of GaAs, GeSiSn, and pure Ge layers at low temperatures on Si(100). These materials display extremely high-quality structural, morphological, and optical properties opening the possibility of versatile integration schemes directly on silicon.