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Steven E. Reder

LSI Corporation

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Publication

Featured researches published by Steven E. Reder.

Archive | 2002

Method and apparatus for cleaning deposited films from the edge of a wafer

Michael J. Berman; Steven E. Reder; Rennie G. Barber

Archive | 2008

In situ measurement

Steven E. Reder; Hemanshu D. Bhatt

Archive | 2003

Method to use a laser to perform the edge clean operation on a semiconductor wafer

Steven E. Reder; Michael J. Berman; Rennie G. Barber

Archive | 2003

Mechanical stress free processing method

Michael J. Berman; Steven E. Reder

Archive | 1999

Uniform axial loading ground glass joint clamp

Steven E. Reder; Preston E. Pillow; William L. Emery

Archive | 2002

Integrated process tool monitoring system for semiconductor fabrication

Attila Balazs; Bruce Whitefield; Hiroshi Mizuno; Russell Whaley; Paul Szasz; Steven E. Reder

Archive | 2004

Method to monitor pad wear in CMP processing

Michael J. Berman; Steven E. Reder; Matthew R. Trattles

Archive | 2002

Adaptable multi zone carrier

Michael J. Berman; Steven E. Reder

Archive | 2003

Electroplating tool for semiconductor manufacture having electric field control

Steven E. Reder; Michael J. Berman

Archive | 2003

Mechanism for improving the structural integrity of low-k films

Michael J. Berman; Steven E. Reder; Hemanshu D. Bhatt

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Michael J. Berman

LSI Corporation

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Hemanshu D. Bhatt

LSI Corporation

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Rennie G. Barber

LSI Corporation

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Bruce Whitefield

LSI Corporation

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Matthew R. Trattles

LSI Corporation

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Attila Balazs

LSI Corporation

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Derryl D. J. Allman

LSI Corporation

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Hiroshi Mizuno

LSI Corporation

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Mark I. Mayeda

LSI Corporation

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Paul Szasz

LSI Corporation

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