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Hemanshu D. Bhatt

LSI Corporation

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Publication

Featured researches published by Hemanshu D. Bhatt.

Archive | 2005

Self-aligned cell integration scheme

Richard Carter; Hemanshu D. Bhatt; Shiqun Gu; Peter A. Burke; James R. B. Elmer; Sey-Shing Sun; Byung-Sung Kwak; Verne Hornback

Archive | 2008

In situ measurement

Steven E. Reder; Hemanshu D. Bhatt

Archive | 2005

Nano structure electrode design

Sey-Shing Sun; Hemanshu D. Bhatt; Peter A. Burke; Richard J. Carter

Archive | 2007

SPACER-LESS TRANSISTOR INTEGRATION SCHEME FOR HIGH-K GATE DIELECTRICS AND SMALL GATE-TO-GATE SPACES APPLICABLE TO SI, SIGE AND STRAINED SILICON SCHEMES

David Pritchard; Hemanshu D. Bhatt; David T. Price

Archive | 2007

Integrated circuit with inductor having horizontal magnetic flux lines

Hemanshu D. Bhatt; Jan Fure; Derryl D. J. Allman

Archive | 2000

Process for forming integrated circuit structure with low dielectric constant material between closely spaced apart metal lines

Hemanshu D. Bhatt; Shafqat Ahmed; Robindranath Banerjee

Archive | 2004

Local interconnect manufacturing process

Santosh S. Menon; Hemanshu D. Bhatt; David Pritchard

Archive | 2005

Alternate pad structures/passivation inegration schemes to reduce or eliminate IMC cracking in post wire bonded dies during Cu/Low-K BEOL processing

Hemanshu D. Bhatt; Dilip Vijay; Jayanthi Pallinti; Sey-Shing Sun; Hong Ying; Chiyi Kao

Archive | 2005

Eliminate IMC cracking in post wirebonded dies: macro level stress reduction by modifying dielectric/metal film stack in be layers during Cu/Low-K processing

Jayanthi Pallinti; Dilip Vijay; Hemanshu D. Bhatt; Sey-Shing Sun; Hong Ying; Chiyi Kao; Peter A. Burke; Ramaswamy Ranganathan; Qwai H. Low

Archive | 2004

Shallow trench isolation depth extension using oxygen implantation

Santosh S. Menon; Hemanshu D. Bhatt

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Sey-Shing Sun

LSI Corporation

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Peter A. Burke

LSI Corporation

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Charles E. May

LSI Corporation

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Chiyi Kao

LSI Corporation

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David Pritchard

LSI Corporation

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Derryl D. J. Allman

LSI Corporation

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Dilip Vijay

LSI Corporation

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Hong Ying

LSI Corporation

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Jayanthi Pallinti

LSI Corporation

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Byung-Sung Kwak

LSI Corporation

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