Steven H. Kim | Researchain

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Featured researches published by Steven H. Kim.

Archive | 2007

Vortex chamber lids for atomic layer deposition

Dien Yeh Wu; Puneet Bajaj; Xiaoxiong Yuan; Steven H. Kim; Schubert S. Chu; Paul F. Ma; Joseph F. Aubuchon

Archive | 2006

Integrated method and apparatus for efficient removal of halogen residues from etched substrates

Mark N. Kawaguchi; Kin Pong Lo; Brett Christian Hoogensen; Sandy M. Wen; Steven H. Kim

Archive | 2004

Magnetic-field concentration in inductively coupled plasma reactors

Siqing Lu; Canfeng Lai; Qiwei Liang; Maolin Long; Irene Chou; Jason Thomas Bloking; Steven H. Kim; Ellie Yieh

Archive | 2008

In-situ chamber treatment and deposition process

Paul F. Ma; Joseph F. Aubuchon; Mei Chang; Steven H. Kim; Dien-Yeh Wu; Norman Nakashima; Mark Johnson; Roja Palakodeti

Archive | 2004

Use of enhanced turbomolecular pump for gapfill deposition using high flows of low-mass fluent gas

Muhammad Rasheed; Steven H. Kim

Archive | 2008

Integrated apparatus for efficient removal of halogen residues from etched substrates

Mark N. Kawaguchi; Kin Pong Lo; Brett Christian Hoogensen; Sandy M. Wen; Steven H. Kim

Archive | 2007

Integrated method for removal of halogen residues from etched substrates in a processing system

Kenneth J. Bahng; Matthew Fenton Davis; Thorsten Lill; Steven H. Kim

Archive | 2005

Two-piece dome with separate RF coils for inductively coupled plasma reactors

Siqing Lu; Qiwei Liang; Canfeng Lai; Robert T. Chen; Jason Thomas Bloking; Irene Chou; Steven H. Kim; Young S. Lee; Ellie Yieh

Archive | 2005

Thermal management of inductively coupled plasma reactors

Siqing Lu; Qiwei Liang; Irene Chou; Steven H. Kim; Young S. Lee; Ellie Yieh; Muhammad Rasheed

Archive | 2007

INTEGRATED METHOD FOR REMOVAL HALOGEN RESIDUES FROM SUBSTRATE ETCHED BY THERMAL PROCESS

Kenneth J. Bahng; Matthew Fenton Davis; Brett Christian Hoogensen; Mark N. Kawaguchi; Steven H. Kim; Thorsten Lill; Kin Pong Lo; Sandy M. Wen; ポンロキン; ジェイ．バーングケニス，; エム．ウェンサンディー; エイチ．キムスティーヴン; リルソーステン; クリスティアンフーゲンセンブレット; ナオシカワグチマーク; フェントンデイヴィスマシュー

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