Kin Pong Lo | Researchain

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Featured researches published by Kin Pong Lo.

Archive | 2009

Etching chamber having flow equalizer and lower liner

James D. Carducci; Kin Pong Lo; Kallol Bera; Michael C. Kutney; Matthew L. Miller

Archive | 2006

Integrated method and apparatus for efficient removal of halogen residues from etched substrates

Mark N. Kawaguchi; Kin Pong Lo; Brett Christian Hoogensen; Sandy M. Wen; Steven H. Kim

Archive | 2008

Integrated apparatus for efficient removal of halogen residues from etched substrates

Mark N. Kawaguchi; Kin Pong Lo; Brett Christian Hoogensen; Sandy M. Wen; Steven H. Kim

Archive | 2015

SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK

Schubert S. Chu; Anhthu Ngo; Karthik Ramanathan; Nitin Pathak; Nyi O. Myo; Paul Brillhart; Richard O. Collins; Kevin Joseph Bautista; Edric Tong; Zhepeng Cong; Anzhong Chang; Kin Pong Lo; Manish Hemkar

Archive | 2014

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

Kin Pong Lo; Paul Brillhart; Satheesh Kuppurao; Daniel Redfield; Joseph M. Ranish; James Francis Mack; Kailash Kiran Patalay; Michael Olsen; Eddie Feigel; Richard Halpin; Brett Vetorino

Archive | 2007

INTEGRATED METHOD FOR REMOVAL HALOGEN RESIDUES FROM SUBSTRATE ETCHED BY THERMAL PROCESS

Kenneth J. Bahng; Matthew Fenton Davis; Brett Christian Hoogensen; Mark N. Kawaguchi; Steven H. Kim; Thorsten Lill; Kin Pong Lo; Sandy M. Wen; ポンロキン; ジェイ．バーングケニス，; エム．ウェンサンディー; エイチ．キムスティーヴン; リルソーステン; クリスティアンフーゲンセンブレット; ナオシカワグチマーク; フェントンデイヴィスマシュー

Archive | 2016

Recursive pumping member

Paul Brillhart; Edric Tong; Anzhong Chang; David K. Carlson; Errol Antonio C. Sanchez; James Francis Mack; Kin Pong Lo; Zhiyuan Ye

Archive | 2015

Upper dome with injection assembly

Paul Brillhart; Anzhong Chang; Edric Tong; Kin Pong Lo; James Francis Mack; Zhiyuan Ye; Errol Antonio C. Sanchez; David K. Carlson; Satheesh Kuppurao; Joseph M. Ranish

Archive | 2015

ONE-PIECE INJECTOR ASSEMBLY AND ONE-PIECE EXHAUST LINER

Paul Brillhart; Kin Pong Lo; Edric Tong; Satheesh Kuppurao

Archive | 2015

THERMAL PROCESSING SUSCEPTOR

Anhthu Ngo; Zuoming Zhu; Paul Brillhart; Edric Tong; Anzhong Chang; Kin Pong Lo; Schubert S. Chu; Zhepeng Cong; James Francis Mack; Nyi O. Myo; Kevin Joseph Bautista; Xuebin Li; Yi-Chiau Huang; Zhiyuan Ye

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