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Sudhanshu Misra

Alcatel-Lucent

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Publication

Featured researches published by Sudhanshu Misra.

Archive | 2006

Customized polishing pads for cmp and methods of fabrication and use thereof

Pradip Kumar Roy; Manish Deopura; Sudhanshu Misra

Archive | 1999

Method of passivating copper interconnects in a semiconductor

Sailesh Mansinh Merchant; Sudhanshu Misra; Pradip Kumar Roy

Archive | 1999

Silicon carbide barrier layers for porous low dielectric constant materials

Sailesh Mansinh Merchant; Sudhanshu Misra; Pradip Kumar Roy

Archive | 2002

Method for making an interconnect layer and a semiconductor device including the same

Donald Thomas Cwynar; Sudhanshu Misra; Dennis Okumu Ouma; Vivek Saxena; John Michael Sharpe

Archive | 1999

Chemical mechanical polishing endpoint detection by monitoring component activity in effluent slurry

William G. Easter; Sudhanshu Misra; Pradip Kumar Roy; Susan C. Vitkavage

Archive | 2010

Customized polish pads for chemical mechanical planarization

Sudhanshu Misra; Pradip Kumar Roy

Archive | 2001

Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method

Sailesh Mansinh Merchant; Sudhanshu Misra; Pradip Kumar Roy; Hem M. Vaidya

Archive | 1999

Method of making a semiconductor device with barrier and conductor protection

Sailesh Mansinh Merchant; Sudhanshu Misra; Pradip Kumar Roy

Archive | 2004

Synthesis of a functionally graded pad for chemical mechanical planarization

Sudhanshu Misra; Pradip Kumar Roy; Manish Deopura

MRS Proceedings | 2005

Stress Characterization of Post-CMP Copper Films Planarized Using Novel Low-Shear and Surface-Engineered Pads

Manish Deopura; Edward Hwang; Sudhanshu Misra; Pradip Kumar Roy

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Collaboration

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Pradip Kumar Roy

Alcatel-Lucent

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Sailesh Mansinh Merchant

Alcatel-Lucent

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Pradip Kumar Roy

Alcatel-Lucent

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Vivek Saxena

Agere Systems

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Hem M. Vaidya

Alcatel-Lucent

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Susan C. Vitkavage

Alcatel-Lucent

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William G. Easter

Alcatel-Lucent

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Dennis Okumu Ouma

Agere Systems

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Donald Thomas Cwynar

Agere Systems

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John Michael Sharpe

Agere Systems

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