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Sunny Wu

TSMC

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Publication

Featured researches published by Sunny Wu.

Archive | 2005

METHOD AND APPARATUS TO ENABLE ACCURATE WAFER PREDICTION

Chun-Hsien Lin; Ping-Hsu Chen; Sunny Wu; Francis Ko

Archive | 2003

Advanced process control approach for Cu interconnect wiring sheet resistance control

Chun Hsien Lin; Ai-Sen Liu; Sunny Wu; Yu-Liang Lin; Henry Lo; Mei-Sheng Zhou

Archive | 2004

Novel method and apparatus for integrating fault detection and real-time virtual metrology in an advanced process control framework

Ping-Hsu Chen; Sunny Wu; Bing-Hung Chen; Francis Ko; Chun-Hsien Lin

Archive | 2003

Method and apparatus for controlling spatial distribution of RF power and plasma density

Sunny Wu; Bing-Hung Chen; Ping-Hsu Chen; Chih-Tien Chang

Archive | 2002

Multi-phase pressure control valve for process chamber

Chih-Tien Chang; Hsueh-Chang Wu; Sunny Wu; Chien-Ling Huang; Chin-Hsin Peng; Mei-Seng Zhou

Archive | 2009

System and method for implementing a wafer acceptance test ("wat") advanced process control ("apc") with novel sampling policy and architecture

Andy Tsen; Jo Fei Wang; Po-Feng Tsai; Ming-Yu Fan; Jill Wang; Jong-I Mou; Sunny Wu

Archive | 2009

Method for bin-based control

Sunny Wu; Chih-Sheng Shih; Andy Tsen; Jo Fei Wang; Jong-I Mou; Hsin Kuan

Archive | 2013

Adaptive and automatic determination of system parameters

Po-Feng Tsai; Chia-Tong Ho; Sunny Wu; Jo Fei Wang; Jong-I Mou

Archive | 2012

Semiconductor processing dispatch control

Sunny Wu; Yen-Di Tsen; Chun-Hsien Lin; Keung Hui; Jo Fei Wang; Jong-I Mou

Archive | 2009

Method for a bin ratio forecast at new tape out stage

Chun-Hsien Lin; Andy Tsen; Jui-Long Chen; Sunny Wu; Jong-I Mou; Chia-Hung Huang

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Jong-I Mou

TSMC

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Jo Fei Wang

TSMC

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Chin-Hsiang Lin

TSMC

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Po-Feng Tsai

TSMC

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Chia-Tong Ho

TSMC

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Chun-Hsien Lin

TSMC

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Andy Tsen

TSMC

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Chih-Tien Chang

TSMC

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Francis Ko

TSMC

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Ping-Hsu Chen

TSMC

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