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Chun-Hsien Lin

TSMC

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Publication

Featured researches published by Chun-Hsien Lin.

Archive | 2005

METHOD AND APPARATUS TO ENABLE ACCURATE WAFER PREDICTION

Chun-Hsien Lin; Ping-Hsu Chen; Sunny Wu; Francis Ko

Archive | 2004

Novel method and apparatus for integrating fault detection and real-time virtual metrology in an advanced process control framework

Ping-Hsu Chen; Sunny Wu; Bing-Hung Chen; Francis Ko; Chun-Hsien Lin

Archive | 2008

Novel Methodology To Realize Automatic Virtual Metrology

Francis Ko; Chih-Wei Lai; Kewei Zuo; Henry Lo; Jean Wang; Ping-Hsu Chen; Chun-Hsien Lin; Chen-Hua Yu

Archive | 2012

Semiconductor processing dispatch control

Sunny Wu; Yen-Di Tsen; Chun-Hsien Lin; Keung Hui; Jo Fei Wang; Jong-I Mou

Archive | 2008

System for extraction of key process parameters from fault detection classification to enable wafer prediction

Chun-Hsien Lin; Francis Ko; Kewei Zuo; Henry Lo; Jean Wang

Archive | 2009

Method for a bin ratio forecast at new tape out stage

Chun-Hsien Lin; Andy Tsen; Jui-Long Chen; Sunny Wu; Jong-I Mou; Chia-Hung Huang

Archive | 2008

Extraction of key process parameter

Chun-Hsien Lin; Francis Ko; Kewei Zuo; Henry Lo; Jean Wang

Archive | 2007

METHODOLOGY TO ENABLE WAFER RESULT PREDICTION OF BATCH TOOLS

Chun-Hsien Lin; Amy Wang; Francis Ko; Jean Wang

Archive | 2007

Methodology to enable wafer result prediction of semiconductor wafer batch processing equipment

Chun-Hsien Lin; Amy Wang; Francis Ko; Jean Wang

Archive | 2007

Auto routing for optimal uniformity control

Jean Wang; Francis Ko; Henry Lo; Chi-Chun Hsieh; Amy Wang; Chih-Wei Lai; Chun-Hsien Lin

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Collaboration

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Francis Ko

TSMC

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Jean Wang

TSMC

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Jong-I Mou

TSMC

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Henry Lo

TSMC

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Sunny Wu

TSMC

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Ping-Hsu Chen

TSMC

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Amy Wang

TSMC

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Andy Tsen

TSMC

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Chih-Wei Lai

TSMC

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Jo Fei Wang

TSMC

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