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Susanne Wehner

Advanced Micro Devices

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Publication

Featured researches published by Susanne Wehner.

Archive | 2006

METHOD OF FORMING A METAL LAYER OVER A PATTERNED DIELECTRIC BY WET CHEMICAL DEPOSITION INCLUDING AN ELECTROLESS AND A POWERED PHASE

Axel Preusse; Susanne Wehner; Markus Nopper

216th ECS Meeting | 2010

Invited) Integration Challenges for Copper Damascene Electroplating

Uwe G. Stöckgen; Susanne Wehner; Jens Heinrich; Axel Kiesel; Romy Liske

Archive | 2008

Method of forming a metal directly on a conductive barrier layer by electrochemical deposition using an oxygen-depleted ambient

Axel Preusse; Charlotte Emnet; Susanne Wehner

Archive | 2008

Profile control on ring anode plating chambers for multi-step recipes

Sylvia Boehlmann; Dirk Wollstein; Susanne Wehner

Planarization / CMP Technology (ICPT), 2007 International Conference on | 2011

Integrated Profile Control from ECP to CMP

Uwe Gunter Stoeckgen; Susanne Wehner; Axel Preusse; Jens Heinrich; Johannes Groschopf

Archive | 2009

Profilsteuerung in Ringanodenplattierkammern für Vielschrittrezepte

Sylvia Boehlmann; Dirk Wollstein; Susanne Wehner

Meeting Abstracts | 2009

Integration Challenges for Copper Damascene Electroplating: An Invited Talk

Uwe Gunter Stoeckgen; Susanne Wehner; Jens Heinrich; Axel Kiesel

Archive | 2008

Profilsteuerung in Ringanodenplattierkammern für Vielschrittrezepte Profile control in Ringanodenplattierkammern for multi-step recipes

Sylvia Boehlmann; Susanne Wehner; Dirk Wollstein

Archive | 2008

Profile control in Ringanodenplattierkammern for multistep recipes

Sylvia Boehlmann; Susanne Wehner; Dirk Wollstein

Archive | 2007

Verfahren zur Herstellung eines Metalls direkt auf einer leitenden Barrierenschicht durch elektrochemische Abscheidung unter Anwendung einer sauerstoffarmen Umgebung A process for the production of a metal directly onto a conductive barrier layer by electrochemical deposition using a low oxygen environment

Charlotte Emnet; Axel Preusse; Susanne Wehner

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Axel Preusse

GlobalFoundries

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Axel Preusse

GlobalFoundries

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Dirk Wollstein

Advanced Micro Devices

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Sylvia Boehlmann

Advanced Micro Devices

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Markus Nopper

GlobalFoundries

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Jens Heinrich

Advanced Micro Devices

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Axel Kiesel

Advanced Micro Devices

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Charlotte Emnet

Advanced Micro Devices

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Markus Nopper

GlobalFoundries

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Uwe Gunter Stoeckgen

Advanced Micro Devices

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