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Uwe Gunter Stoeckgen

Advanced Micro Devices

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Publication

Featured researches published by Uwe Gunter Stoeckgen.

Archive | 2004

Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner

Jens Kramer; Uwe Gunter Stoeckgen; Jens Kunath

Archive | 2007

Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet

Axel Kiesel; Uwe Gunter Stoeckgen; John Lampett; Heiko Wundram

Archive | 2002

Polishing head and apparatus with an improved pad conditioner for chemical mechanical polishing

Uwe Gunter Stoeckgen; Gerd Marxsen

Archive | 2007

CMP SYSTEM HAVING AN EDDY CURRENT SENSOR OF REDUCED HEIGHT

Jens Heinrich; Axel Kiesel; Uwe Gunter Stoeckgen; Mike Schlicker

Archive | 2007

Method and system for controlling chemical mechanical polishing by taking zone specific substrate data into account

Gerd Marxsen; Uwe Gunter Stoeckgen; Jens Heinrich; Alexander Hoefgen

Archive | 2003

Method of reducing a defect level after chemically mechanically polishing a copper-containing substrate by rinsing the substrate with an oxidizing solution

Uwe Gunter Stoeckgen; Gerd Marxsen

Archive | 2000

Apparatus and method for chemical mechanical polishing of a substrate

Uwe Gunter Stoeckgen; Gerd Marxsen

Archive | 2008

CMP-System mit einem Wirbelstromsensor mit geringerer Höhe

Jens Heinrich; Axel Kiesel; Uwe Gunter Stoeckgen; Mike Schlicker

Archive | 2004

Verfahren zur Reduzierung eines Defektpegels nach dem chemisch mechanischen Polieren eines Kupfer enthaltenden Substrats durch Spülen des Substrats mit einer oxidierenden Lösung

Uwe Gunter Stoeckgen; Gerd Marxsen

Archive | 2005

Method of reworking a semiconductor structure

Axel Preusse; Uwe Gunter Stoeckgen; Markus Nopper

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Collaboration

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Gerd Marxsen

Advanced Micro Devices

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Jens Heinrich

Advanced Micro Devices

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Jens Kramer

Advanced Micro Devices

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Axel Kiesel

Advanced Micro Devices

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Jens Kunath

Advanced Micro Devices

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René Kai Nagel

Advanced Micro Devices

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Alexander Hoefgen

Advanced Micro Devices

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Axel Preusse

Advanced Micro Devices

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Mike Schlicker

Advanced Micro Devices

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Heiko Wundram

Advanced Micro Devices

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