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Swaminathan Sivakumar

Intel

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Publication

Featured researches published by Swaminathan Sivakumar.

Archive | 2004

Sub-resolution assist features

Charles H. Wallace; Paul A. Nyhus; Swaminathan Sivakumar

Archive | 2002

Patterning tighter and looser pitch geometries

Swaminathan Sivakumar; Mark Bohr

Archive | 2003

Multiple exposure technique to pattern tight contact geometries

Swaminathan Sivakumar; Rex K. Frost; Phi L. Nguyen

Archive | 1996

Method of controlling etch bias with a fixed lithography pattern for sub-micron critical dimension shallow trench applications

Phi L. Nguyen; Ralph A. Schweinfurth; Swaminathan Sivakumar

Archive | 2004

Forming self-aligned nano-electrodes

Valery M. Dubin; Swaminathan Sivakumar; Andrew Berlin; Mark Bohr

Archive | 2005

Non-collinear end-to-end structures with sub-resolution assist features

Charles H. Wallace; Shannon E. Daviess; Swaminathan Sivakumar

Archive | 2015

Directed self assembly of block copolymers to form vias aligned with interconnects

Paul A. Nyhus; Swaminathan Sivakumar; Robert Bristol

Archive | 2002

Imageable bottom anti-reflective coating for high resolution lithography

Swaminathan Sivakumar

Archive | 2003

Pre-exposure of patterned photoresist films to achieve critical dimension reduction during temperature reflow

Rex K. Frost; Swaminathan Sivakumar

Archive | 2009

Method of patterning a metal on a vertical sidewall of an excavated feature, method of forming an embedded mim capacitor using same, and embedded memory device produced thereby

Steven J. Keating; Nick Lindert; Nadia M. Rahhal-Orabi; Brian S. Doyle; Satyarth Suri; Swaminathan Sivakumar; Lana Jong; Lin Sha

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Collaboration

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Charles H. Wallace

Intel

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Paul A. Nyhus

Intel

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Nick Lindert

Intel

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Elliot N. Tan

Intel

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Nadia M. Rahhal-Orabi

Intel

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Rex K. Frost

Intel

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Brian S. Doyle

Intel

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Dinesh Somasekhar

Intel

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Kevin Zhang

Intel

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Lana Jong

Intel

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