Is this you? Create Your Porfile
Avatar

Elliot N. Tan

Intel

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Elliot N. Tan is active.

Explore More

Publication

Featured researches published by Elliot N. Tan.

Archive | 2010

Feature size reduction

Elliot N. Tan; Michael K. Harper

Archive | 2008

Methods for double patterning photoresist

Swaminathan Sivakumar; Anna Lio; Elliot N. Tan; Charles H. Wallace; Anant Jahagirdar

Archive | 2013

Previous Layer Self-Aligned Via and Plug Patterning for Back End of Line (BEOL)Interconnects

Charles H. Wallace; Paul A. Nyhus; Elliot N. Tan; Swaminathan Sivakumar

Archive | 2004

Method for controlling critical dimensions and etch bias

Elliot N. Tan; James Jeong; Qiang Fu

Archive | 2007

FABRICATION OF SUB-RESOLUTION FEATURES FOR AN INTEGRATED CIRCUIT

Elliot N. Tan; James Jeong

Archive | 2007

Double patterning with single hard mask

Elliot N. Tan; Michael K. Harper; James Jeong

Archive | 2017

PATTERN DECOMPOSITION LITHOGRAPHY TECHNIQUES

Charles H. Wallace; Hossam M. Abdallah; Elliot N. Tan; Swaminathan Sivakumar; Oleg Golonzka; Robert M. Bigwood

Archive | 2013

Method and structure to contact tight pitch conductive layers with guided vias

Richard Schenker; Elliot N. Tan

Archive | 2014

METHODS FOR FORMING INTERCONNECT LAYERS HAVING TIGHT PITCH INTERCONNECT STRUCTURES

Christopher J. Jezewski; Jasmeet S. Chawla; Kanwal Jit Singh; Alan Myers; Elliot N. Tan; Richard Schenker

Archive | 2011

SPACER ASSISTED PITCH DIVISION LITHOGRAPHY

Swaminathan Sivakumar; Elliot N. Tan

Explore More

Collaboration

Dive into the Elliot N. Tan's collaboration.

Top Co-Authors
Avatar

Swaminathan Sivakumar

Intel

View shared research outputs
Top Co-Authors
Avatar

Charles H. Wallace

Intel

View shared research outputs
Top Co-Authors
Avatar

James Jeong

Intel

View shared research outputs
Top Co-Authors
Avatar

Michael K. Harper

Intel

View shared research outputs
Top Co-Authors
Avatar

Paul A. Nyhus

Intel

View shared research outputs
Top Co-Authors
Avatar

Richard Schenker

Intel

View shared research outputs
Top Co-Authors
Avatar

Alan Myers

Intel

View shared research outputs
Top Co-Authors
Avatar

Christopher J. Jezewski

Intel

View shared research outputs
Top Co-Authors
Avatar

Hossam M. Abdallah

Intel

View shared research outputs
Top Co-Authors
Avatar

Jasmeet S. Chawla

Intel

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge