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Dive into the research topics where Tabata Mitsuo is active.

Publication


Featured researches published by Tabata Mitsuo.


Archive | 1984

Electrostatic chucking device

Toujiyou Tooru; Gotou Mineo; Sugihara Kazuyoshi; Tabata Mitsuo


Archive | 1998

INSPECTION DEVICE FOR PATTERN DEFECT

Tojo Toru; Tabata Mitsuo; Sanada Yasushi; Yoshino Toshikazu; Taya Makoto


Archive | 1996

METHOD AND DEVICE FOR INSPECTING PATTERN FOR DEFECT

Tabata Mitsuo; Tojo Toru; Tsuchiya Hideo; Watanabe Toshiyuki


Archive | 1993

OPTICAL SUBSTRATE INSPECTING DEVICE

Tojo Toru; Sanada Yasushi; Tabata Mitsuo; Yamashita Kyoji; Nagai Hideo; Kobayashi Noboru; Yoshino Toshikazu; Taya Makoto; Miwa Tamami


Archive | 1994

PATTERN DEFECT INSPECTION METHOD AND DEVICE

Tabata Mitsuo; Tojo Toru; Watanabe Tomohide


Archive | 2003

APPARATUS AND METHOD FOR INSPECTING SAMPLE

Isomura Yasutada; Nakajima Kazuhiro; Sanada Yasushi; Tsuchiya Hideo; Tabata Mitsuo


Archive | 1990

ALIGNMENT MARK AND ALIGNING METHOD USING SAME

Tojo Toru; Tabata Mitsuo; Touki Tatsuhiko; Nishisaka Takeshi; Yoshino Toshikazu; Saito Susumu


Archive | 2004

METHOD OF ADJUSTING HEIGHT POSITION OF TEST PIECE FACE

Ogawa Tsutomu; Tabata Mitsuo


Archive | 1994

POSITION DETECTOR FOR OBJECTIVE PLANE

Sato Takuji; Tabata Mitsuo


Archive | 1988

SAMPLE SURFACE POSITION MEASURING INSTRUMENT

Tojo Toru; Tabata Mitsuo; Ito Tsutomu; Oiwa Norihisa; Azumagi Tatsuhiko; Takahashi Susumu

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