Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Sugihara Kazuyoshi is active.

Publication


Featured researches published by Sugihara Kazuyoshi.


Archive | 2000

ELECTRON BEAM PLOTTING METHOD AND DEVICE THEREFOR

Hashimoto Susumu; Ando Koji; Sugihara Kazuyoshi; Miyoshi Motosuke; Yamazaki Yuichiro; Kinoshita Hidetoshi; Wakayama Shigeru; Hayashi Masakazu


Archive | 2006

ELECTRON BEAM DEVICE AND DEVICE MANUFACTURING METHOD USING THE SAME

Sugihara Kazuyoshi; Yamazaki Yuichiro; Nakasuji Mamoru; Nomichi Shinji; Satake Toru


Archive | 1984

Electrostatic chucking device

Toujiyou Tooru; Gotou Mineo; Sugihara Kazuyoshi; Tabata Mitsuo


Archive | 2001

CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM

Ando Koji; Sugihara Kazuyoshi


Archive | 1999

METHOD AND APPARATUS FOR EVALUATING PATTERN

Nakasugi Tetsuo; Shiobara Hideshi; Yamazaki Yuichiro; Sugihara Kazuyoshi


Archive | 1982

ELECTRON BEAM TRANSFER DEVICE

Sugihara Kazuyoshi; Toujiyou Tooru; Mori Ichirou; Shinozaki Toshiaki


Archive | 2002

STATIC DEFLECTOR AND METHOD FOR MANUFACTURING THE SAME, STATIC LENS AND METHOD FOR MANUFACTURING THE SAME, AND ELECTRON BEAM RADIATION DEVICE AND METHOD FOR CLEANING THE SAME

Ota Takumi; Ando Koji; Sugihara Kazuyoshi; Okumura Katsuya


Archive | 2002

Fotomasken-Reparaturverfahren und Vorrichtung

Kanamitsu Shingo; Hirano Takashi; Shigemitsu Fumiaki; Miyoshi Motosuke; Sugihara Kazuyoshi; Yamazaki Yuichiro; Sekine Makoto; Sakai Takayuki; Mori Ichiro; Okumura Katsuya


Archive | 1983

CASSETTE RETAINER FOR ELECTRON BEAM APPARATUS

Hata Shiyuntarou; Sugihara Kazuyoshi; Toujiyou Tooru; Suzuki Yoshio; Numaga Takuoki; Mukouyama Haruhisa


Archive | 2001

CHARGED BEAM APPARATUS AND PATTERN INCLINE OBSERVATION METHOD

Abe Hideaki; Yamazaki Yuichiro; Sugihara Kazuyoshi; Inoue Masahiro

Collaboration


Dive into the Sugihara Kazuyoshi's collaboration.

Researchain Logo
Decentralizing Knowledge