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Dive into the research topics where Tojo Toru is active.

Publication


Featured researches published by Tojo Toru.


Archive | 2004

PATTERN PLOTTING METHOD AND DEVICE

Hirano Ryoichi; Tachikawa Yuichi; Mitsui Soichiro; Ogasawara Munehiro; Tojo Toru


Archive | 1998

INSPECTION DEVICE FOR PATTERN DEFECT

Tojo Toru; Tabata Mitsuo; Sanada Yasushi; Yoshino Toshikazu; Taya Makoto


Archive | 2001

CHARGED PARTICLE BEAM EXPOSURE SYSTEM AND METHOD THEREOF

Akeno Masanobu; Takigawa Tadahiko; Shinoda Toshiki; Noguchi Shigeru; Hirano Ryoichi; Tojo Toru


Archive | 2004

METHOD FOR INSPECTING FLAW OF PATTERN AND INSPECTION DEVICE THEREFOR

Tojo Toru; Watanabe Toshiyuki; Isomura Ikunao; Matsuki Kazuto; Ogawa Tsutomu; Sekine Akihiko


Archive | 2003

ALIGNING APPARATUS OF SUBSTRATE

Mitsui Soichiro; Tojo Toru; Akeno Masanobu


Archive | 1999

CHARGED BEAM IMAGE DRAWING EQUIPMENT AND METHOD

Tojo Toru; Hirano Ryoichi; Yoshitake Hidesuke


Archive | 1998

PROXIMITY EFFECT CORRECTION DEVICE FOR CHARGED PARTICLE BEAM LITHOGRAPHY

Hattori Yoshiaki; Iijima Tomohiro; Tsurumaki Hideyuki; Abe Takayuki; Oki Susumu; Shimizu Mitsuko; Kamikubo Takashi; Tojo Toru; Yoshikawa Ryoichi; Katayama Mitsunobu


Archive | 1996

METHOD AND DEVICE FOR INSPECTING PATTERN FOR DEFECT

Tabata Mitsuo; Tojo Toru; Tsuchiya Hideo; Watanabe Toshiyuki


Archive | 1993

OPTICAL SUBSTRATE INSPECTING DEVICE

Tojo Toru; Sanada Yasushi; Tabata Mitsuo; Yamashita Kyoji; Nagai Hideo; Kobayashi Noboru; Yoshino Toshikazu; Taya Makoto; Miwa Tamami


Archive | 2000

ELECTRODE FOR ELECTRON BEAM IMAGE FORMING DEVICE AND ITS MANUFACTURE

Yoshitake Hidesuke; Wakayama Shigeru; Hirasawa Hiroaki; Shimada Masayuki; Tojo Toru; Suzuki Akira; Shimoyama Toshiaki

Collaboration


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