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Tae-yeol Heo

Samsung

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Publication

Featured researches published by Tae-yeol Heo.

Archive | 2003

Semiconductor wafers having asymmetric edge profiles that facilitate high yield processing by inhibiting particulate contamination and methods of forming same

Gi-jung Kim; Woo-Serk Kim; Sang-mun Chon; Tae-yeol Heo

Archive | 2000

Methods and systems for measuring microroughness of a substrate combining particle counter and atomic force microscope measurements

Kyoo-chul Cho; Tae-yeol Heo; Jeong-Hoon An; Gi-jung Kim

Archive | 2000

Wafer surface inspection method

Tae-yeol Heo; Kyoo-chul Cho; Kyong-rim Kang; Soo-yeul Choi

Archive | 2003

Semiconductor wafers having asymmetric edge profiles that facilitate high yield processing by inhibiting particulate contamination

Gi-jung Kim; Woo-Serk Kim; Sang-mun Chon; Tae-yeol Heo

Archive | 2004

Susceptor and deposition apparatus including the same

Tae-Soo Kang; Soo-Yeol Choi; Kyoo-chul Cho; Gi-jung Kim; Jin-Ho Kim; Tae-yeol Heo

Archive | 2003

Apparatus for analyzing a substrate employing a copper decoration

Gi-jung Kim; Kyoo-chul Cho; Tae-yeol Heo; Sook-Hyun Park

Archive | 2001

Method of analyzing morphology of bulk defect and surface defect on semiconductor wafer

Sung-hoon Cho; Tae-yeol Heo

Archive | 1998

Slurry compositions for polishing wafers used in integrated circuit devices and cleaning compositions for removing electron wax after polishing

Tae-yeol Heo; Jung-min Park; Sung-hoon Cho; Gi-jung Kim

Archive | 2003

Semiconductor wafer, has asymmetric edge profile extending between inner and outer edge profiles with arc that defines inner profile at point of intersection with top surface of wafer

Sang-mun Chon; Tae-yeol Heo; Gi-jung Kim; Woo-Seok Kim

Archive | 2003

Halbleiterwafer mit asymmetrischem Kantenprofil und Herstellungsverfahren hierfür A semiconductor wafer with an asymmetric edge profile and manufacturing method thereof

Sang-mun Chon; Tae-yeol Heo; Gi-jung Kim; Woo-Seok Kim

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Collaboration

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Gi-jung Kim

Samsung

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Kyoo-chul Cho

Samsung

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Jeong-Hoon An

Samsung

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Sang-mun Chon

Samsung

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Kyong-rim Kang

Samsung

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Soo-yeul Choi

Samsung

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Sung-hoon Cho

Samsung

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Woo-Seok Kim

Samsung

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Woo-Serk Kim

Samsung

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Jung-min Park

Samsung

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